Invention Grant
- Patent Title: Trench capacitor with warpage reduction
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Application No.: US16774014Application Date: 2020-01-28
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Publication No.: US11271072B2Publication Date: 2022-03-08
- Inventor: Jiao Jia , Zhipeng Feng , He Lin , Yunlong Liu , Manoj Jain
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Andrew R. Ralston; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L21/768 ; H01L21/02 ; H01L21/3215 ; H01L21/3213 ; H01L23/495 ; H01L23/00 ; H01L21/3205 ; H01L25/18 ; H01L21/306 ; H01L29/78 ; H01L23/31

Abstract:
A trench capacitor includes a plurality of trenches in a semiconductor substrate. A first polysilicon layer is located within the plurality of trenches and over a top surface of the substrate. The first polysilicon layer is continuous between the plurality of trenches. The trench capacitor further includes a plurality of second polysilicon layers. Each of the second polysilicon layers fills a corresponding trench of the plurality of trenches. The second polysilicon layers each extend to a top surface of the first polysilicon layer.
Public/Granted literature
- US20200161415A1 TRENCH CAPACITOR WITH WARPAGE REDUCTION Public/Granted day:2020-05-21
Information query
IPC分类: