Invention Grant
- Patent Title: Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
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Application No.: US16991820Application Date: 2020-08-12
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Publication No.: US11277112B2Publication Date: 2022-03-15
- Inventor: Gabriele Gattere , Lorenzo Corso , Alessandro Tocchio , Carlo Valzasina
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102017000057094 20170525
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/24 ; H03H3/007
Abstract:
A microelectromechanical device having a mobile structure including mobile arms formed from a composite material and having a fixed structure including fixed arms capacitively coupled to the mobile arms. The composite material includes core regions of insulating material and a silicon coating.
Public/Granted literature
- US20200373904A1 MICRO-ELECTRO-MECHANICAL DEVICE WITH REDUCED TEMPERATURE SENSITIVITY AND MANUFACTURING METHOD THEREOF Public/Granted day:2020-11-26
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