Invention Grant
- Patent Title: Heat treated ceramic substrate having ceramic coating
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Application No.: US16378344Application Date: 2019-04-08
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Publication No.: US11279661B2Publication Date: 2022-03-22
- Inventor: Jennifer Y. Sun , Ren-Guan Duan , Biraja P. Kanungo , Dmitry Lubomirsky
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: C04B41/87
- IPC: C04B41/87 ; C04B41/52 ; C04B41/00 ; C04B41/50 ; C04B41/80 ; C04B41/89
Abstract:
A heat treated ceramic article includes a ceramic substrate and a ceramic coating on the ceramic substrate. The ceramic coating is a non-sintered ceramic coating that has a different composition than the ceramic substrate. The heat treated ceramic article further includes a transition layer between the ceramic substrate and the ceramic coating, the transition layer comprising first elements from the ceramic coating that have reacted with second elements from the ceramic substrate, wherein the transition layer has a thickness of about 0.1 microns to about 5 microns.
Public/Granted literature
- US20190233343A1 HEAT TREATED CERAMIC SUBSTRATE HAVING CERAMIC COATING Public/Granted day:2019-08-01
Information query
