公开(公告)号：US10934216B2

公开(公告)日：2021-03-02

申请号：US16405783

申请日：2019-05-07

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Biraja P. Kanungo

IPC分类号： C04B35/50 ,  C04B35/505 ,  C23C14/08 ,  C04B35/626 ,  C04B37/00 ,  C04B37/02 ,  H01L21/687 ,  C23C16/44 ,  H01J37/32 ,  C23C4/11 ,  C23C4/134 ,  C04B35/622 ,  C23C16/40 ,  H01L21/67 ,  H01L21/683 ,  C23C16/455 ,  C23C16/50 ,  C23C14/22

摘要： An article comprises a plasma resistant ceramic material comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of above 30 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of over 0 molar % to approximately 30 molar %.

公开(公告)号：US10577286B2

公开(公告)日：2020-03-03

申请号：US15796487

申请日：2017-10-27

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Biraja P. Kanungo

IPC分类号： C04B35/505 ,  C04B35/486 ,  C04B35/111 ,  H01L21/67 ,  C04B35/50 ,  C04B35/626 ,  C04B37/00 ,  C04B37/02 ,  H01L21/687 ,  C23C16/44 ,  H01J37/32 ,  C23C4/11 ,  C23C4/134 ,  C04B35/622 ,  C23C16/40 ,  H01L21/683 ,  C23C16/455 ,  C23C16/50 ,  C23C14/22

摘要： An article comprises a plasma resistant ceramic material comprising 40-60 mol % of Y2O3, 35-50 mol % of ZrO2, and 10-20 mol % of Al2O3.

公开(公告)号：US20200035463A1

公开(公告)日：2020-01-30

申请号：US16594561

申请日：2019-10-07

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Yikai Chen ,  Biraja P. Kanungo

IPC分类号： H01J37/32 ,  C23C4/10 ,  C23C4/18 ,  C23C4/11 ,  C23C4/134

摘要： A method for forming a plasma resistant ceramic coating on an article includes placing the article into a chamber or spray cell of a plasma spraying system. A ceramic powder is then fed into the plasma spraying system at a powder feed rate, and a plasma resistant ceramic coating is deposited onto at least one surface of the article in a plasma spray process by the plasma spray system. The plasma spray system is then used to perform an in-situ plasma flame heat treatment of the plasma resistant ceramic coating to form crust on the plasma resistant ceramic coating.

公开(公告)号：US10364197B2

公开(公告)日：2019-07-30

申请号：US14938624

申请日：2015-11-11

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Ren-Guan Duan ,  Biraja P. Kanungo ,  Dmitry Lubomirsky

IPC分类号： C04B41/87 ,  C04B41/00 ,  C04B41/50 ,  C04B41/80 ,  C04B41/89 ,  C04B41/52

摘要： A heat treated ceramic article includes a ceramic substrate and a ceramic coating on the ceramic substrate. The ceramic coating is a non-sintered ceramic coating that has a different composition than the ceramic substrate. The heat treated ceramic article further includes a transition layer between the ceramic substrate and the ceramic coating, the transition layer comprising first elements from the ceramic coating that have reacted with second elements from the ceramic substrate, wherein the transition layer has a thickness of about 0.1 microns to about 5 microns.

公开(公告)号：US20180269039A1

公开(公告)日：2018-09-20

申请号：US15982888

申请日：2018-05-17

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Biraja P. Kanungo ,  Dmitry Lubomirsky

IPC分类号： H01J37/32 ,  H01L21/02 ,  C23C4/134 ,  C23C4/11 ,  C04B41/50 ,  C04B41/00 ,  C04B41/87 ,  H01L21/67 ,  C04B35/10 ,  C04B35/565 ,  C04B41/45

CPC分类号： H01J37/32495 ,  C04B41/009 ,  C04B41/5042 ,  C04B41/87 ,  C23C4/11 ,  C23C4/134 ,  H01J37/32477 ,  H01L21/02 ,  H01L21/67017 ,  Y10T428/24413 ,  Y10T428/2495 ,  Y10T428/24975 ,  Y10T428/252 ,  C04B35/10 ,  C04B35/565 ,  C04B41/4527 ,  C04B41/5032

摘要： A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. The method further includes plasma spray coating the body to apply a ceramic coating onto the body, wherein the ceramic coating comprises the yttrium oxide containing solid solution, wherein the donut-shaped particles cause the ceramic coating to have an improved morphology and a decreased porosity as compared to powder particles of other shapes, wherein the improved surface morphology comprises a reduced amount of surface nodules.

公开(公告)号：US20180151401A1

公开(公告)日：2018-05-31

申请号：US15874495

申请日：2018-01-18

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Senh Thach ,  Biraja P. Kanungo ,  Vahid Firouzdor

IPC分类号： H01L21/683 ,  H01L21/687

CPC分类号： H01L21/6831 ,  H01L21/6875 ,  H01L21/68757 ,  Y10T156/1041 ,  Y10T428/24322 ,  Y10T428/24997

摘要： A substrate support assembly comprises a ceramic body and a thermally conductive base bonded to a lower surface of the ceramic body. The substrate support assembly further comprises a protective layer covering an upper surface of the ceramic body, wherein the protective layer comprises at least one of yttrium aluminum garnet (YAG) or a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.

公开(公告)号：US20180102237A1

公开(公告)日：2018-04-12

申请号：US15835923

申请日：2017-12-08

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Biraja P. Kanungo ,  Tom Cho

IPC分类号： H01J37/32 ,  C23C4/134 ,  C23C4/11 ,  C04B41/50 ,  C04B41/00 ,  C23C16/44 ,  C04B41/87 ,  C04B35/00 ,  C04B35/10 ,  C04B35/581 ,  C04B41/45

CPC分类号： H01J37/32495 ,  C04B41/009 ,  C04B41/5045 ,  C04B41/87 ,  C23C4/11 ,  C23C4/134 ,  C23C16/4404 ,  Y10T428/131 ,  Y10T428/26 ,  C04B35/00 ,  C04B35/10 ,  C04B35/581 ,  C04B41/4527 ,  C04B41/5031 ,  C04B41/5042

摘要： An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 0 mol % to about 55 mol %, and Al2O3 in a range between about 0 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 30 mol % to about 60 mol %, ZrO2 in a range between about 0 mol % to about 20 mol %, and Al2O3 in a range between about 30 mol % to about 60 mol %.

公开(公告)号：US09916998B2

公开(公告)日：2018-03-13

申请号：US14086799

申请日：2013-11-21

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Senh Thach ,  Biraja P. Kanungo ,  Vahid Firouzdor

IPC分类号： H01L21/683 ,  H01L21/687

CPC分类号： H01L21/6831 ,  H01L21/6875 ,  H01L21/68757 ,  Y10T156/1041 ,  Y10T428/24322 ,  Y10T428/24997

摘要： A substrate support assembly comprises a ceramic body and a thermally conductive base bonded to a lower surface of the ceramic body. The substrate support assembly further comprises a protective layer covering an upper surface of the ceramic body, wherein the protective layer comprises at least one of yttrium aluminum garnet (YAG) or a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.

公开(公告)号：US20180030589A1

公开(公告)日：2018-02-01

申请号：US15717844

申请日：2017-09-27

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Biraja P. Kanungo ,  Vahid Firouzdor

IPC分类号： C23C14/22 ,  C23C4/134 ,  H01J37/32 ,  C23C14/08 ,  C23C14/46

摘要： A chamber component comprises a body, a first protective layer and a conformal second protective layer over the first protective layer. The first protective layer comprises a plasma resistant ceramic, has a thickness of greater than approximately 50 microns and comprises a plurality of cracks and pores. The conformal second protective layer comprises a plasma resistant rare earth oxide, has a thickness of less than 50 microns, has a porosity of less than 1%, and seals the plurality of cracks and pores of the first protective layer.

公开(公告)号：US20170130319A1

公开(公告)日：2017-05-11

申请号：US15413198

申请日：2017-01-23

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Biraja P. Kanungo ,  Vahid Firouzdor ,  Ying Zhang

IPC分类号： C23C14/00 ,  C23C14/08 ,  H01J37/32 ,  H01L21/67

CPC分类号： H01L21/67023 ,  B65D43/02 ,  C23C4/01 ,  C23C4/04 ,  C23C4/10 ,  C23C4/11 ,  C23C4/12 ,  C23C4/134 ,  C23C4/14 ,  C23C4/16 ,  C23C14/0015 ,  C23C14/0021 ,  C23C14/0031 ,  C23C14/0036 ,  C23C14/0052 ,  C23C14/0084 ,  C23C14/0094 ,  C23C14/08 ,  C23C14/081 ,  C23C14/083 ,  C23C14/088 ,  H01J37/32477 ,  H01J37/32495 ,  H01J37/32513 ,  H01J2237/334 ,  H01L21/67063 ,  H01L21/67069 ,  H01L21/6708 ,  H01L21/67086 ,  Y10T428/131 ,  Y10T428/1317 ,  Y10T428/139 ,  Y10T428/1393

摘要： A method of manufacturing an article comprises performing ion assisted deposition (IAD) to deposit a protective layer on at least one surface of the article, wherein the protective layer is a plasma resistant rare earth oxide film having a thickness of less than 300 μm and an average surface roughness of 10 micro-inches or less.