- 专利标题： Heat treated ceramic substrate having ceramic coating
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申请号： US16378344申请日： 2019-04-08
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公开(公告)号： US11279661B2公开(公告)日： 2022-03-22
- 发明人: Jennifer Y. Sun , Ren-Guan Duan , Biraja P. Kanungo , Dmitry Lubomirsky
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Lowenstein Sandler LLP
- 主分类号： C04B41/87
- IPC分类号： C04B41/87 ; C04B41/52 ; C04B41/00 ; C04B41/50 ; C04B41/80 ; C04B41/89
摘要：
A heat treated ceramic article includes a ceramic substrate and a ceramic coating on the ceramic substrate. The ceramic coating is a non-sintered ceramic coating that has a different composition than the ceramic substrate. The heat treated ceramic article further includes a transition layer between the ceramic substrate and the ceramic coating, the transition layer comprising first elements from the ceramic coating that have reacted with second elements from the ceramic substrate, wherein the transition layer has a thickness of about 0.1 microns to about 5 microns.
公开/授权文献
- US20190233343A1 HEAT TREATED CERAMIC SUBSTRATE HAVING CERAMIC COATING 公开/授权日：2019-08-01
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