Invention Grant
- Patent Title: Composition for forming upper layer film, pattern forming method, resist pattern, and method for manufacturing electronic device
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Application No.: US15700518Application Date: 2017-09-11
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Publication No.: US11281103B2Publication Date: 2022-03-22
- Inventor: Naoya Hatakeyama , Naoki Inoue , Naohiro Tango , Michihiro Shirakawa , Akiyoshi Goto
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JPJP2015-071831 20150331,JPJP2015-133265 20150702
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/20 ; C08F20/36 ; C08K5/32 ; C08L33/10 ; C08L33/16 ; C08L101/00 ; C08F26/02 ; G03F7/32 ; C09D133/04 ; H01L21/027 ; G03F7/38 ; G03F7/039 ; C08K5/33

Abstract:
A composition for forming an upper layer film is applied onto a resist film formed using an actinic ray-sensitive or radiation-sensitive resin composition, and includes a resin X and a compound A having a radical trapping group. A pattern forming method includes applying an actinic ray-sensitive or radiation-sensitive resin composition onto a substrate to form a resist film, applying the composition for forming an upper layer film onto the resist film to form an upper layer film on the resist film, exposing the resist film having the upper layer film formed thereon, and developing the exposed resist film using a developer including an organic solvent to form a pattern.
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