Invention Grant
- Patent Title: Vertical capacitor structure and non-volatile memory device including the same
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Application No.: US16662073Application Date: 2019-10-24
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Publication No.: US11282851B2Publication Date: 2022-03-22
- Inventor: Taehong Kwon , Chanho Kim , Daeseok Byeon , Pansuk Kwak , Chiweon Yoon
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2019-0038603 20190402
- Main IPC: H01L27/11573
- IPC: H01L27/11573 ; H01L23/522 ; H01L27/1157 ; H01L29/78 ; H01L29/94 ; H01L27/11582

Abstract:
A non-volatile memory device includes a substrate, a memory cell string including a vertical channel structure and memory cells, a voltage generator including a first transistor and configured to provide various voltages to the memory cells, and a vertical capacitor structure. The vertical capacitor structure includes first and second active patterns apart from each other in a first horizontal direction, a first gate pattern located above a channel region between the first and second active patterns, a first gate insulating film between the first gate pattern and the substrate in a vertical direction, and capacitor electrodes each extending in the vertical direction. The first transistor includes a second gate pattern and a second gate insulating film between the second gate pattern and the substrate in the vertical direction. The first gate insulating film has a thickness greater than a thickness of the second gate insulating film in the vertical direction.
Public/Granted literature
- US20200321349A1 VERTICAL CAPACITOR STRUCTURE AND NON-VOLATILE MEMORY DEVICE INCLUDING THE SAME Public/Granted day:2020-10-08
Information query
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