Invention Grant
- Patent Title: Semiconductor device and method
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Application No.: US17000632Application Date: 2020-08-24
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Publication No.: US11289480B2Publication Date: 2022-03-29
- Inventor: Chung-Chiang Wu , Shih-Hang Chiu , Chih-Chang Hung , I-Wei Yang , Shu-Yuan Ku , Cheng-Lung Hung , Da-Yuan Lee , Ching-Hwanq Su
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/06 ; H01L27/11 ; H01L21/8234 ; H01L29/66

Abstract:
A method includes forming a first semiconductor fin in a substrate, forming a metal gate structure over the first semiconductor fin, removing a portion of the metal gate structure to form a first recess in the metal gate structure that is laterally separated from the first semiconductor fin by a first distance, wherein the first distance is determined according to a first desired threshold voltage associated with the first semiconductor fin, and filling the recess with a dielectric material.
Information query
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