- Patent Title: Integrated assemblies and methods of forming integrated assemblies
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Application No.: US16863000Application Date: 2020-04-30
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Publication No.: US11296103B2Publication Date: 2022-04-05
- Inventor: Shyam Surthi , Kunal Shrotri , Matthew Thorum
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/11578
- IPC: H01L27/11578 ; H01L27/1157 ; H01L27/11524 ; H01L27/11582 ; H01L27/11556 ; H01L27/11565 ; H01L27/11519

Abstract:
Some embodiments include an integrated assembly having a vertical stack of alternating insulative and conductive levels. The conductive levels have terminal regions and nonterminal regions. The terminal regions are vertically thicker than the nonterminal regions. Channel material extends vertically through the stack. Tunneling material is adjacent the channel material. Charge-storage material is adjacent the tunneling material. High-k dielectric material is between the charge-storage material and the terminal regions of the conductive levels. The insulative levels have carbon-containing first regions between the terminal regions of neighboring conductive levels, and have second regions between the nonterminal regions of the neighboring conductive levels. Some embodiments include methods of forming integrated assemblies.
Public/Granted literature
- US20210343728A1 Integrated Assemblies and Methods of Forming Integrated Assemblies Public/Granted day:2021-11-04
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