发明授权
- 专利标题: Structure and method to fabricate highly reactive physical vapor deposition target
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申请号: US16682498申请日: 2019-11-13
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公开(公告)号: US11299801B2公开(公告)日: 2022-04-12
- 发明人: Stephen L. Brown , Bruce B. Doris , Mark C. Reuter
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Tutunjian & Bitetto, P.C.
- 代理商 Daniel Morris
- 主分类号: C23C14/34
- IPC分类号: C23C14/34 ; C23C14/08 ; H01J37/34 ; C23C14/06
摘要:
A physical vapor deposition (PVD) target that includes a body composed of material that is reactive with an oxygen containing atmosphere; and a non-reactive cap layer encapsulating at least a sputter surface of the body. The non-reactive cap layer is a barrier obstructing the diffusion of oxygen containing species to the body of the PVD target.