Invention Grant
- Patent Title: Delivery of light into a vacuum chamber using an optical fiber
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Application No.: US16691843Application Date: 2019-11-22
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Publication No.: US11302590B2Publication Date: 2022-04-12
- Inventor: Emanuel Saerchen , Donald W. Pettibone , Oscar Florendo , Li-Min Chen , Martin Brutsch
- Applicant: KLA CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA CORPORATION
- Current Assignee: KLA CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G01R31/311 ; H01L21/67 ; G01N21/95
Abstract:
A system for laser enhanced voltage contrast using an optical fiber is provided. The system includes a vacuum chamber with a stage that secures a wafer. A laser light source outside the vacuum chamber directs light to an optical fiber. The optical fiber transmits all wavelengths of light from the laser light source into the vacuum chamber through a wall of the vacuum chamber.
Public/Granted literature
- US20200266116A1 DELIVERY OF LIGHT INTO A VACUUM CHAMBER USING AN OPTICAL FIBER Public/Granted day:2020-08-20
Information query
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