公开(公告)号：US11302590B2

公开(公告)日：2022-04-12

申请号：US16691843

申请日：2019-11-22

Applicant: KLA CORPORATION

Inventor： Emanuel Saerchen ,  Donald W. Pettibone ,  Oscar Florendo ,  Li-Min Chen ,  Martin Brutsch

IPC: H01L21/66 ,  G01R31/311 ,  H01L21/67 ,  G01N21/95

Abstract: A system for laser enhanced voltage contrast using an optical fiber is provided. The system includes a vacuum chamber with a stage that secures a wafer. A laser light source outside the vacuum chamber directs light to an optical fiber. The optical fiber transmits all wavelengths of light from the laser light source into the vacuum chamber through a wall of the vacuum chamber.

公开(公告)号：US20200266116A1

公开(公告)日：2020-08-20

申请号：US16691843

申请日：2019-11-22

Applicant: KLA CORPORATION

Inventor： Emanuel Saerchen ,  Donald W. Pettibone ,  Oscar Florendo ,  Li-Min Chen ,  Martin Brutsch

IPC: H01L21/66 ,  G01N21/95 ,  H01L21/67 ,  G01R31/311

Abstract: A system for laser enhanced voltage contrast using an optical fiber is provided. The system includes a vacuum chamber with a stage that secures a wafer. A laser light source outside the vacuum chamber directs light to an optical fiber. The optical fiber transmits all wavelengths of light from the laser light source into the vacuum chamber through a wall of the vacuum chamber.