Invention Grant
- Patent Title: Transistor gates and method of forming
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Application No.: US16943110Application Date: 2020-07-30
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Publication No.: US11302793B2Publication Date: 2022-04-12
- Inventor: Hsin-Yi Lee , Ji-Cheng Chen , Cheng-Lung Hung , Chi On Chui
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/78 ; H01L29/66 ; H01L29/40 ; H01L29/06 ; H01L29/49

Abstract:
A device includes a first nanostructure; a second nanostructure over the first nanostructure; a first high-k gate dielectric disposed around the first nanostructure; a second high-k gate dielectric being disposed around the second nanostructure; and a gate electrode over the first high-k gate dielectric and the second high-k gate dielectric. A portion of the gate electrode between the first nanostructure and the second nanostructure comprises a first portion of a p-type work function metal filling an area between the first high-k gate dielectric and the second high-k gate dielectric.
Public/Granted literature
- US20210391436A1 TRANSISTOR GATES AND METHOD OF FORMING Public/Granted day:2021-12-16
Information query
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