Invention Grant
- Patent Title: Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method
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Application No.: US16073258Application Date: 2017-01-05
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Publication No.: US11303175B2Publication Date: 2022-04-12
- Inventor: Maarten Hartger Kimman , Dave Braaksma , Peter Michel Silvester Maria Heijmans , Christiaan Alexander Hoogendam
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: DiBerardino McGovern IP Group LLC
- Priority: EP16155377 20160212
- International Application: PCT/EP2017/050199 WO 20170105
- International Announcement: WO2017/137181 WO 20170817
- Main IPC: H02K3/28
- IPC: H02K3/28 ; H02K41/03 ; H02K29/03 ; H02K7/09
Abstract:
An electromagnetic motor is described, the electromagnetic motor comprising:
a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction;
a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.
a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction;
a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.
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