Invention Grant
- Patent Title: Method for producing optical film
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Application No.: US16306722Application Date: 2017-05-31
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Publication No.: US11306392B2Publication Date: 2022-04-19
- Inventor: Shunsuke Shuto , Satoru Saki
- Applicant: NITTO DENKO CORPORATION
- Applicant Address: JP Ibaraki
- Assignee: NITTO DENKO CORPORATION
- Current Assignee: NITTO DENKO CORPORATION
- Current Assignee Address: JP Ibaraki
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JPJP2016-113943 20160607,JPJP2017-097698 20170516
- International Application: PCT/JP2017/020314 WO 20170531
- International Announcement: WO2017/213001 WO 20171214
- Main IPC: C23C14/54
- IPC: C23C14/54 ; C23C14/08 ; G02B1/116 ; G02B1/115

Abstract:
In a preliminary deposition for producing an optical film in which multilayered optical thin-film is formed on a film substrate, a plurality of sputtering chambers are simultaneously energized to deposit a stacked body of thin-films made of two or more different materials on the film substrate, and the thicknesses of the plurality of thin-films are calculated from the optical properties obtained by the optical measuring unit (80) equipped in a sputtering apparatus. Measurement of the thicknesses and adjusting the deposition conditions for thin-films are repeated until the optical properties obtained by the optical measurement unit or the thickness of the respective thin-films calculated from the optical properties falls within a prescribed range.
Public/Granted literature
- US20190127845A1 METHOD FOR PRODUCING OPTICAL FILM Public/Granted day:2019-05-02
Information query
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