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公开(公告)号:US20190127845A1
公开(公告)日:2019-05-02
申请号:US16306722
申请日:2017-05-31
Applicant: NITTO DENKO CORPORATION
Inventor: Shunsuke Shuto , Satoru Saki
Abstract: In a preliminary deposition for producing an optical film in which multilayered optical thin-film is formed on a film substrate, a plurality of sputtering chambers are simultaneously energized to deposit a stacked body of thin-films made of two or more different materials on the film substrate, and the thicknesses of the plurality of thin-films are calculated from the optical properties obtained by the optical measuring unit (80) equipped in a sputtering apparatus. Measurement of the thicknesses and adjusting the deposition conditions for thin-films are repeated until the optical properties obtained by the optical measurement unit or the thickness of the respective thin-films calculated from the optical properties falls within a prescribed range.
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公开(公告)号:US20190127844A1
公开(公告)日:2019-05-02
申请号:US16306711
申请日:2017-06-02
Applicant: NITTO DENKO CORPORATION
Inventor: Satoru Saki , Shunsuke Shuto
Abstract: A method is disclosed to accurately estimate the thickness of each layer of a multilayer film. A first optical value difference between an actually measured optical value and a first theoretical optical value is obtained, and the first optical value difference is compared with a preset convergence condition. In a case where the first optical value difference does not satisfy the convergence condition, a second estimated thickness value of each layer expected to have an optical value difference smaller than the first optical value difference is set. A second optical value difference between an actually measured optical value and a second theoretical optical value is obtained, and the second optical value difference is compared with the convergence condition. Each step is repeated to obtain the estimated thickness value of each layer in which the difference between the actually measured optical value and the theoretical optical value satisfies the convergence condition.
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公开(公告)号:US11066741B2
公开(公告)日:2021-07-20
申请号:US16306711
申请日:2017-06-02
Applicant: NITTO DENKO CORPORATION
Inventor: Satoru Saki , Shunsuke Shuto
Abstract: A method is disclosed to accurately estimate the thickness of each layer of a multilayer film. A first optical value difference between an actually measured optical value and a first theoretical optical value is obtained, and the first optical value difference is compared with a preset convergence condition. In a case where the first optical value difference does not satisfy the convergence condition, a second estimated thickness value of each layer expected to have an optical value difference smaller than the first optical value difference is set. A second optical value difference between an actually measured optical value and a second theoretical optical value is obtained, and the second optical value difference is compared with the convergence condition. Each step is repeated to obtain the estimated thickness value of each layer in which the difference between the actually measured optical value and the theoretical optical value satisfies the convergence condition.
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公开(公告)号:US11306392B2
公开(公告)日:2022-04-19
申请号:US16306722
申请日:2017-05-31
Applicant: NITTO DENKO CORPORATION
Inventor: Shunsuke Shuto , Satoru Saki
Abstract: In a preliminary deposition for producing an optical film in which multilayered optical thin-film is formed on a film substrate, a plurality of sputtering chambers are simultaneously energized to deposit a stacked body of thin-films made of two or more different materials on the film substrate, and the thicknesses of the plurality of thin-films are calculated from the optical properties obtained by the optical measuring unit (80) equipped in a sputtering apparatus. Measurement of the thicknesses and adjusting the deposition conditions for thin-films are repeated until the optical properties obtained by the optical measurement unit or the thickness of the respective thin-films calculated from the optical properties falls within a prescribed range.
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公开(公告)号:US20140234539A1
公开(公告)日:2014-08-21
申请号:US14343885
申请日:2013-02-04
Applicant: NITTO DENKO CORPORATION
Inventor: Yoshiaki Kitani , Satoru Saki , Yoshihiro Kitamura , Isao Hirose , Hiroshi Matsuo , Tetsuo Nasu
CPC classification number: B05C1/0886 , B05C5/0266 , B05D1/00 , B05D1/26 , B05D2252/02 , B05D2506/10 , B29C48/08 , B29C48/155 , B29C48/254 , B29C48/30 , B29C48/31 , B29C2948/92628
Abstract: A die-type coating device includes a supply roll, a die, a rewinding roll, web widthwise end position detection devices, and layer widthwise end position detection devices. The die includes a pair of inner deckles which adjust a coating width. The inner deckle is arranged at one of two end portions of the die and configured to be easily moved in the die in a longitudinal direction of the die. The die includes a drive device which drives and moves the inner deckles. The drive device is driven on a basis of information on both widthwise end positions of the web detected by the web widthwise end position detection devices and information on both widthwise end positions of the layer of the coating liquid or the coating layer detected by the layer widthwise end position detection devices so that respective positions of the inner deckles relative to the die are changed.
Abstract translation: 模具型涂布装置包括供给辊,模具,卷绕辊,卷筒纸宽度端位置检测装置和层宽度端位置检测装置。 模具包括一对调整涂层宽度的内层板。 所述内板布置在所述模具的两个端部之一中并且构造成沿着所述模具的纵向方向在所述模具中容易地移动。 模具包括驱动和移动内层板的驱动装置。 基于由幅材宽度端位置检测装置检测到的幅材的宽度方向端位置的信息以及由层宽度方向检测的涂布液层或涂层的宽度方向端部位置的信息来驱动驱动装置 结束位置检测装置,使得内板相对于模具的相应位置改变。
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