Invention Grant
- Patent Title: Protection liner on interconnect wire to enlarge processing window for overlying interconnect via
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Application No.: US16908942Application Date: 2020-06-23
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Publication No.: US11309241B2Publication Date: 2022-04-19
- Inventor: Shin-Yi Yang , Hsin-Yen Huang , Ming-Han Lee , Shau-Lin Shue , Yu-Chen Chan , Meng-Pei Lu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/532 ; H01L21/768

Abstract:
In some embodiments, the present disclosure relates to an integrated chip that includes a lower dielectric arranged over a substrate. An interconnect wire is arranged over the dielectric layer, and a first interconnect dielectric layer is arranged outer sidewalls of the interconnect wire. A protection liner that includes graphene is arranged directly on the outer sidewalls of the interconnect wire and on a top surface of the interconnect wire. The integrated chip further includes a first etch stop layer arranged directly on upper surfaces of the first interconnect dielectric layer, and a second interconnect dielectric layer arranged over the first interconnect dielectric layer and the interconnect wire. Further, an interconnect via extends through the second interconnect dielectric layer, is arranged directly over the protection liner, and is electrically coupled to the interconnect wire.
Public/Granted literature
- US20210398898A1 PROTECTION LINER ON INTERCONNECT WIRE TO ENLARGE PROCESSING WINDOW FOR OVERLYING INTERCONNECT VIA Public/Granted day:2021-12-23
Information query
IPC分类: