Invention Grant
- Patent Title: Pressure sensor device and method for forming a pressure sensor device
-
Application No.: US16333671Application Date: 2017-10-02
-
Publication No.: US11313749B2Publication Date: 2022-04-26
- Inventor: Joerg Siegert , Willem Frederik Adrianus Besling , Coenraad Cornelis Tak , Martin Schrems , Franz Schrank
- Applicant: Sciosense B.V.
- Applicant Address: NL Eindhoven
- Assignee: Sciosense B.V.
- Current Assignee: Sciosense B.V.
- Current Assignee Address: NL Eindhoven
- Agency: Slater Matsil, LLP
- Priority: EP16191894 20160930,EP16196616 20161031
- International Application: PCT/EP2017/074953 WO 20171002
- International Announcement: WO2018/060515 WO 20180405
- Main IPC: G01L19/14
- IPC: G01L19/14 ; G01L9/00 ; G01L19/04 ; G01L7/08 ; G01L9/12

Abstract:
In an embodiment a pressure sensor device includes a substrate body, a pressure sensor having a membrane and a cap body having at least one opening, wherein the pressure sensor is arranged between the substrate body and the cap body in a vertical direction which is perpendicular to a main plane of extension of the substrate body, and wherein the mass of the substrate body amounts to at least 80% of the mass of the cap body and at most 120% of the mass of the cap body.
Public/Granted literature
- US20190265119A1 PRESSURE SENSOR DEVICE AND METHOD FOR FORMING A PRESSURE SENSOR DEVICE Public/Granted day:2019-08-29
Information query