公开(公告)号：US20220221363A1

公开(公告)日：2022-07-14

申请号：US17708407

申请日：2022-03-30

Applicant: Sciosense B.V.

Inventor： Jörg Siegert ,  Willem Frederik Adrianus Besling ,  Coenraad Cornelis Tak ,  Martin Schrems ,  Franz Schrank

IPC: G01L19/14 ,  G01L9/00 ,  G01L19/04 ,  G01L7/08 ,  G01L9/12

Abstract: In an embodiment a method for forming a pressure sensor device includes providing a pressure sensor on a substrate body, the pressure sensor comprising a membrane, depositing a top layer on top of the substrate body and the pressure sensor, connecting a cap body with the top layer, a mass of the cap body being approximately equal to a mass of the substrate body and introducing at least one opening in the cap body.

公开(公告)号：US11313749B2

公开(公告)日：2022-04-26

申请号：US16333671

申请日：2017-10-02

Applicant: Sciosense B.V.

Inventor： Joerg Siegert ,  Willem Frederik Adrianus Besling ,  Coenraad Cornelis Tak ,  Martin Schrems ,  Franz Schrank

IPC: G01L19/14 ,  G01L9/00 ,  G01L19/04 ,  G01L7/08 ,  G01L9/12

Abstract: In an embodiment a pressure sensor device includes a substrate body, a pressure sensor having a membrane and a cap body having at least one opening, wherein the pressure sensor is arranged between the substrate body and the cap body in a vertical direction which is perpendicular to a main plane of extension of the substrate body, and wherein the mass of the substrate body amounts to at least 80% of the mass of the cap body and at most 120% of the mass of the cap body.