- 专利标题: MEMS accelerometer self-test using an active mobile mass deflection technique
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申请号: US16452904申请日: 2019-06-26
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公开(公告)号: US11320452B2公开(公告)日: 2022-05-03
- 发明人: Yamu Hu , David McClure , Alessandro Tocchio , Naren K. Sahoo , Anthony Junior Casillan
- 申请人: STMicroelectronics, Inc. , STMicroelectronics S.r.l.
- 申请人地址: US TX Coppell; IT Agrate Brianza
- 专利权人: STMicroelectronics, Inc.,STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics, Inc.,STMicroelectronics S.r.l.
- 当前专利权人地址: US TX Coppell; IT Agrate Brianza
- 代理机构: Crowe & Dunlevy
- 主分类号: G01P21/00
- IPC分类号: G01P21/00 ; G01P15/08
摘要:
A microelectromechanical system (MEMS) accelerometer sensor has a mobile mass and a sensing capacitor. To self-test the sensor, a test signal is applied to the sensing capacitor during a reset phase of a sensing circuit coupled to the sensing capacitor. The test signal is configured to cause an electrostatic force which produces a physical displacement of the mobile mass corresponding to a desired acceleration value. Then, during a read phase of the sensing circuit, a variation in capacitance of sensing capacitor due to the physical displacement of the mobile mass is sensed. This sensed variation in capacitance is converted to a sensed acceleration value. A comparison of the sensed acceleration value to the desired acceleration value provides an indication of an error in operation of the MEMS accelerometer sensor if the sensed acceleration value and desired acceleration value are not substantially equal.
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