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公开(公告)号：US11320452B2
公开(公告)日：2022-05-03
申请号：US16452904
申请日：2019-06-26
摘要： A microelectromechanical system (MEMS) accelerometer sensor has a mobile mass and a sensing capacitor. To self-test the sensor, a test signal is applied to the sensing capacitor during a reset phase of a sensing circuit coupled to the sensing capacitor. The test signal is configured to cause an electrostatic force which produces a physical displacement of the mobile mass corresponding to a desired acceleration value. Then, during a read phase of the sensing circuit, a variation in capacitance of sensing capacitor due to the physical displacement of the mobile mass is sensed. This sensed variation in capacitance is converted to a sensed acceleration value. A comparison of the sensed acceleration value to the desired acceleration value provides an indication of an error in operation of the MEMS accelerometer sensor if the sensed acceleration value and desired acceleration value are not substantially equal.
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公开(公告)号：US20150323944A1
公开(公告)日：2015-11-12
申请号：US14270677
申请日：2014-05-06
IPC分类号： G05F1/10
摘要： A modulated digital input signal is passed through a conditioning circuit to generate a first input signal. An error amplifier circuit receives the first input signal and a second input signal, and controls the operation of a MOS transistor to generate an output signal that is current modulated. The output signal is sensed to generate a feedback signal. A switching circuit selectively applies the feedback signal as the second input signal in response to a transition of the modulated digital input signal from a first logic state to a second logic state. The switching circuit alternatively selectively applies a fixed reference signal as the second input signal to the error amplifier in response to a transition of the modulated digital input signal from the second logic state to the first logic state.
摘要翻译： 调制数字输入信号通过调理电路以产生第一输入信号。 误差放大器电路接收第一输入信号和第二输入信号，并且控制MOS晶体管的操作以产生电流调制的输出信号。 感测输出信号以产生反馈信号。 响应于调制的数字输入信号从第一逻辑状态到第二逻辑状态的转变，开关电路选择性地将反馈信号作为第二输入信号施加。 响应于调制的数字输入信号从第二逻辑状态到第一逻辑状态的转变，开关电路交替地选择性地将固定参考信号作为第二输入信号施加到误差放大器。
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公开(公告)号：US09568927B2
公开(公告)日：2017-02-14
申请号：US14270677
申请日：2014-05-06
摘要： A modulated digital input signal is passed through a conditioning circuit to generate a first input signal. An error amplifier circuit receives the first input signal and a second input signal, and controls the operation of a MOS transistor to generate an output signal that is current modulated. The output signal is sensed to generate a feedback signal. A switching circuit selectively applies the feedback signal as the second input signal in response to a transition of the modulated digital input signal from a first logic state to a second logic state. The switching circuit alternatively selectively applies a fixed reference signal as the second input signal to the error amplifier in response to a transition of the modulated digital input signal from the second logic state to the first logic state.
摘要翻译： 调制数字输入信号通过调理电路以产生第一输入信号。 误差放大器电路接收第一输入信号和第二输入信号，并且控制MOS晶体管的操作以产生电流调制的输出信号。 感测输出信号以产生反馈信号。 响应于调制的数字输入信号从第一逻辑状态到第二逻辑状态的转变，开关电路选择性地将反馈信号作为第二输入信号施加。 响应于调制的数字输入信号从第二逻辑状态到第一逻辑状态的转变，开关电路交替地选择性地将固定参考信号作为第二输入信号施加到误差放大器。
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公开(公告)号：US12111158B2
公开(公告)日：2024-10-08
申请号：US18136088
申请日：2023-04-18
发明人： Deyou Fang , Chao-Ming Tsai , Milad Alwardi , Yamu Hu , David McClure
IPC分类号： G01C19/5726 , G01C19/5733 , G01C25/00
CPC分类号： G01C19/5726 , G01C19/5733 , G01C25/005
摘要： A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.
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公开(公告)号：US12092653B2
公开(公告)日：2024-09-17
申请号：US17472126
申请日：2021-09-10
发明人： Davy Choi , Yamu Hu , Deyou Fang
IPC分类号： G01P21/00 , G01P15/125 , G01R19/10 , G01R31/28
CPC分类号： G01P21/00 , G01P15/125 , G01R19/10 , G01R31/2829
摘要： In one embodiment, a method for detecting functional state of a microelectromechanical (MEMS) sensor is described. The method includes monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit coupled to the MEMS sensor through a plurality of nodes. The method also includes determining, using the monitored ICMFB voltage, whether all of the plurality of nodes of the MEMS sensor are electrically connected to the ICMFB circuit.
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公开(公告)号：US11175138B2
公开(公告)日：2021-11-16
申请号：US16452850
申请日：2019-06-26
发明人： Deyou Fang , Chao-Ming Tsai , Milad Alwardi , Yamu Hu , David McClure
IPC分类号： G01C19/5726 , G01C25/00 , G01C19/5733
摘要： A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.
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公开(公告)号：US11143670B2
公开(公告)日：2021-10-12
申请号：US15599234
申请日：2017-05-18
发明人： Davy Choi , Yamu Hu , Deyou Fang
IPC分类号： G01P21/00 , G01P15/125 , G01R19/10 , G01R31/28
摘要： In one embodiment, a method for detecting functional state of a microelectromechanical (MEMS) sensor is described. The method includes monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit coupled to the MEMS sensor through a plurality of nodes. The method also includes determining, using the monitored ICMFB voltage, whether all of the plurality of nodes of the MEMS sensor are electrically connected to the ICMFB circuit.
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公开(公告)号：US11162790B2
公开(公告)日：2021-11-02
申请号：US16452813
申请日：2019-06-26
发明人： Deyou Fang , Chao-Ming Tsai , Yamu Hu
IPC分类号： G01C19/5719 , G01C19/5607 , G01C19/5642 , G01C19/56 , G01C19/5649
摘要： A drive signal is applied to a MEMS gyroscope having several intrinsic resonant modes. Frequency and amplitude of mechanical oscillation in response to the drive signal is sensed. At startup, the drive signal frequency is set to a kicking frequency offset from a resonant frequency corresponding to a desired one of the intrinsic resonant modes. In response to sufficient sensed amplitude of mechanical oscillation at the kicking frequency, a frequency tracking process is engaged to control the frequency for the drive signal to sustain mechanical oscillation at the frequency of the desired one of the plurality of intrinsic resonant modes as the oscillation amplitude increases. When the increasing amplitude of the mechanical oscillation exceeds a threshold, a gain control process is used to exercise gain control over the applied drive signal so as to cause the amplitude of mechanical oscillation to match a further threshold. At that point start-up terminates.
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公开(公告)号：US11719540B2
公开(公告)日：2023-08-08
申请号：US17571973
申请日：2022-01-10
发明人： Yamu Hu , Deyou Fang , David McClure , Huantong Zhang , Naren K. Sahoo
IPC分类号： G01C19/5719 , H04L27/38
CPC分类号： G01C19/5719 , H04L27/3863
摘要： A microelectromechanical system (MEMS) gyroscope sensor has a sensing mass and a quadrature error compensation control loop for applying a force to the sensing mass to cancel quadrature error. To detect fault, the quadrature error compensation control loop is opened and an additional force is applied to produce a physical displacement of the sensing mass. A quadrature error resulting from the physical displacement of the sensing mass in response to the applied additional force is sensed. The sensed quadrature error is compared to an expected value corresponding to the applied additional force and a fault alert is generated if the comparison is not satisfied.
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公开(公告)号：US11255670B2
公开(公告)日：2022-02-22
申请号：US16452967
申请日：2019-06-26
发明人： Yamu Hu , Deyou Fang , David Mcclure , Huantong Zhang , Naren K. Sahoo
IPC分类号： G01C19/5719 , H04L27/38
摘要： A microelectromechanical system (MEMS) gyroscope sensor has a sensing mass and a quadrature error compensation control loop for applying a force to the sensing mass to cancel quadrature error. To detect fault, the quadrature error compensation control loop is opened and an additional force is applied to produce a physical displacement of the sensing mass. A quadrature error resulting from the physical displacement of the sensing mass in response to the applied additional force is sensed. The sensed quadrature error is compared to an expected value corresponding to the applied additional force and a fault alert is generated if the comparison is not satisfied.
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