公开(公告)号：US11320452B2

公开(公告)日：2022-05-03

申请号：US16452904

申请日：2019-06-26

Applicant: STMicroelectronics, Inc. ,  STMicroelectronics S.r.l.

Inventor： Yamu Hu ,  David McClure ,  Alessandro Tocchio ,  Naren K. Sahoo ,  Anthony Junior Casillan

IPC: G01P21/00 ,  G01P15/08

Abstract: A microelectromechanical system (MEMS) accelerometer sensor has a mobile mass and a sensing capacitor. To self-test the sensor, a test signal is applied to the sensing capacitor during a reset phase of a sensing circuit coupled to the sensing capacitor. The test signal is configured to cause an electrostatic force which produces a physical displacement of the mobile mass corresponding to a desired acceleration value. Then, during a read phase of the sensing circuit, a variation in capacitance of sensing capacitor due to the physical displacement of the mobile mass is sensed. This sensed variation in capacitance is converted to a sensed acceleration value. A comparison of the sensed acceleration value to the desired acceleration value provides an indication of an error in operation of the MEMS accelerometer sensor if the sensed acceleration value and desired acceleration value are not substantially equal.

公开(公告)号：US20150323944A1

公开(公告)日：2015-11-12

申请号：US14270677

申请日：2014-05-06

Applicant: STMICROELECTRONICS, INC. ,  STMICROELECTRONICS S.R.L.

Inventor： Tom Youssef ,  Alessandro Gasparini ,  Yamu Hu ,  Naren K. Sahoo ,  Anthony Junior Casillan

IPC: G05F1/10

CPC classification number: G05F1/561 ,  G05F1/10

Abstract: A modulated digital input signal is passed through a conditioning circuit to generate a first input signal. An error amplifier circuit receives the first input signal and a second input signal, and controls the operation of a MOS transistor to generate an output signal that is current modulated. The output signal is sensed to generate a feedback signal. A switching circuit selectively applies the feedback signal as the second input signal in response to a transition of the modulated digital input signal from a first logic state to a second logic state. The switching circuit alternatively selectively applies a fixed reference signal as the second input signal to the error amplifier in response to a transition of the modulated digital input signal from the second logic state to the first logic state.

Abstract translation: 调制数字输入信号通过调理电路以产生第一输入信号。 误差放大器电路接收第一输入信号和第二输入信号，并且控制MOS晶体管的操作以产生电流调制的输出信号。 感测输出信号以产生反馈信号。 响应于调制的数字输入信号从第一逻辑状态到第二逻辑状态的转变，开关电路选择性地将反馈信号作为第二输入信号施加。 响应于调制的数字输入信号从第二逻辑状态到第一逻辑状态的转变，开关电路交替地选择性地将固定参考信号作为第二输入信号施加到误差放大器。

公开(公告)号：US09568927B2

公开(公告)日：2017-02-14

申请号：US14270677

申请日：2014-05-06

Applicant: STMicroelectronics, Inc. ,  STMicroelectronics S.r.l.

Inventor： Tom Youssef ,  Alessandro Gasparini ,  Yamu Hu ,  Naren K. Sahoo ,  Anthony Junior Casillan

IPC: G05F1/00 ,  G05F1/56 ,  G05F1/10

CPC classification number: G05F1/561 ,  G05F1/10

Abstract: A modulated digital input signal is passed through a conditioning circuit to generate a first input signal. An error amplifier circuit receives the first input signal and a second input signal, and controls the operation of a MOS transistor to generate an output signal that is current modulated. The output signal is sensed to generate a feedback signal. A switching circuit selectively applies the feedback signal as the second input signal in response to a transition of the modulated digital input signal from a first logic state to a second logic state. The switching circuit alternatively selectively applies a fixed reference signal as the second input signal to the error amplifier in response to a transition of the modulated digital input signal from the second logic state to the first logic state.

Abstract translation: 调制数字输入信号通过调理电路以产生第一输入信号。 误差放大器电路接收第一输入信号和第二输入信号，并且控制MOS晶体管的操作以产生电流调制的输出信号。 感测输出信号以产生反馈信号。 响应于调制的数字输入信号从第一逻辑状态到第二逻辑状态的转变，开关电路选择性地将反馈信号作为第二输入信号施加。 响应于调制的数字输入信号从第二逻辑状态到第一逻辑状态的转变，开关电路交替地选择性地将固定参考信号作为第二输入信号施加到误差放大器。

公开(公告)号：US11719540B2

公开(公告)日：2023-08-08

申请号：US17571973

申请日：2022-01-10

Applicant: STMicroelectronics, Inc.

Inventor： Yamu Hu ,  Deyou Fang ,  David McClure ,  Huantong Zhang ,  Naren K. Sahoo

IPC: G01C19/5719 ,  H04L27/38

CPC classification number: G01C19/5719 ,  H04L27/3863

Abstract: A microelectromechanical system (MEMS) gyroscope sensor has a sensing mass and a quadrature error compensation control loop for applying a force to the sensing mass to cancel quadrature error. To detect fault, the quadrature error compensation control loop is opened and an additional force is applied to produce a physical displacement of the sensing mass. A quadrature error resulting from the physical displacement of the sensing mass in response to the applied additional force is sensed. The sensed quadrature error is compared to an expected value corresponding to the applied additional force and a fault alert is generated if the comparison is not satisfied.

公开(公告)号：US11255670B2

公开(公告)日：2022-02-22

申请号：US16452967

申请日：2019-06-26

Applicant: STMicroelectronics, Inc.

Inventor： Yamu Hu ,  Deyou Fang ,  David Mcclure ,  Huantong Zhang ,  Naren K. Sahoo

IPC: G01C19/5719 ,  H04L27/38

Abstract: A microelectromechanical system (MEMS) gyroscope sensor has a sensing mass and a quadrature error compensation control loop for applying a force to the sensing mass to cancel quadrature error. To detect fault, the quadrature error compensation control loop is opened and an additional force is applied to produce a physical displacement of the sensing mass. A quadrature error resulting from the physical displacement of the sensing mass in response to the applied additional force is sensed. The sensed quadrature error is compared to an expected value corresponding to the applied additional force and a fault alert is generated if the comparison is not satisfied.