Invention Grant
- Patent Title: Semiconductor die containing dummy metallic pads and methods of forming the same
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Application No.: US16879146Application Date: 2020-05-20
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Publication No.: US11322466B2Publication Date: 2022-05-03
- Inventor: Teruo Okina
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/00 ; H01L23/58 ; H01L25/18 ; H01L25/00 ; H01L23/528

Abstract:
A first semiconductor die includes first semiconductor devices located over a first substrate, first interconnect-level dielectric layers embedding first metal interconnect structures and located over the first semiconductor devices, a first pad-level dielectric layer embedding first bonding pads and located over the first interconnect-level dielectric layers, and first edge seal structures laterally surrounding the first semiconductor devices. Each of the first edge seal structures vertically extends from the first substrate to a distal surface of the first pad-level dielectric layer, and includes a respective first pad-level ring structure that continuously extends around the first semiconductor devices. At least one row of first dummy metal pads is embedded in the first pad-level dielectric layer between a respective pair of first edge seal structures. Second pad-level ring structures embedded in a second semiconductor die can be bonded to the rows of first dummy metal pads.
Public/Granted literature
- US20210366855A1 SEMICONDUCTOR DIE CONTAINING DUMMY METALLIC PADS AND METHODS OF FORMING THE SAME Public/Granted day:2021-11-25
Information query
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