- 专利标题: Method for MRAM top electrode connection
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申请号: US16884353申请日: 2020-05-27
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公开(公告)号: US11322543B2公开(公告)日: 2022-05-03
- 发明人: Harry-Hak-Lay Chuang , Hung Cho Wang , Sheng-Chang Chen , Sheng-Huang Huang
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L27/22
- IPC分类号: H01L27/22 ; H01L43/02 ; H01L43/12
摘要:
Various embodiments of the present disclosure are directed towards a memory device including a protective sidewall spacer layer that laterally encloses a memory cell. An upper inter-level dielectric (ILD) layer overlying a substrate. The memory cell is disposed with the upper ILD layer. The memory cell includes a top electrode, a bottom electrode, and a magnetic tunnel junction (MTJ) structure disposed between the top and bottom electrodes. A sidewall spacer structure laterally surrounds the memory cell. The sidewall spacer structure includes a first sidewall spacer layer, a second sidewall spacer layer, and the protective sidewall spacer layer. The first and second sidewall spacer layers comprise a first material and the protective sidewall spacer layer comprises a second material different from the first material. A conductive wire overlying the first memory cell. The conductive wire contacts the top electrode and the protective sidewall spacer layer.
公开/授权文献
- US20210375987A1 METHOD FOR MRAM TOP ELECTRODE CONNECTION 公开/授权日:2021-12-02
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