- 专利标题: Multilayer ultrasonic transducer and ultrasonic inspection device
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申请号: US16131588申请日: 2018-09-14
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公开(公告)号: US11322676B2公开(公告)日: 2022-05-03
- 发明人: Tsuyoshi Kobayashi , Noriko Yamamoto , Yasuharu Hosono , Mitsunaga Saito , Kazuhiro Itsumi , Akiko Hirao , Tomio Ono
- 申请人: KABUSHIKI KAISHA TOSHIBA
- 申请人地址: JP Minato-ku
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Minato-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JPJP2018-054092 20180322
- 主分类号: H01L41/047
- IPC分类号: H01L41/047 ; B06B1/02 ; B06B1/06 ; H01L41/04 ; G01N29/24 ; H01L41/08 ; H01L41/293 ; H01L41/297 ; H01L41/27 ; H01L41/083
摘要:
A multilayer ultrasonic transducer of an embodiment includes: a plurality of stacked oscillators; external electrodes disposed on outer exposed surfaces of two oscillators disposed in the outermost layers out of the plurality of oscillators; and a plurality of internal electrodes each disposed between two of the plurality of oscillators. There are provided electrode regions in which the plurality of internal electrodes are arranged such that the number of layers of the internal electrodes in a direction in which the oscillators are stacked gradiently increases from an inner region toward an outer peripheral region of the plurality of oscillators, and ultrasonic waves emitted from the plurality of oscillators are focused toward at least the inner region.
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