Invention Grant
- Patent Title: Linearized micromechanical sensor
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Application No.: US16471221Application Date: 2017-12-08
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Publication No.: US11326969B2Publication Date: 2022-05-10
- Inventor: Stefan Zehringer , Andreas Duell , Arne Dannenberg , Helmut Grutzeck , Jochen Franz , Mike Schwarz , Soeren Zimmermann , Stephan Oppl
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102017200057.0 20170104
- International Application: PCT/EP2017/081938 WO 20171208
- International Announcement: WO2018/127352 WO 20180712
- Main IPC: G01L9/00
- IPC: G01L9/00 ; B81B3/00

Abstract:
A micromechanical sensor includes a substrate having a cavity; a flexible diaphragm spanning the cavity; and a lever element that spans the diaphragm and has a first and second end section on opposite sides of a center section. A first joint element is between the first end section and the substrate and a second joint element is between the center section and the diaphragm. The lever element can be pivoted due to a deflection of the diaphragm. Two capacitive sensors are provided, each having two electrodes, one electrode of each sensor being mounted at one of the end sections of the lever element, and the other being mounted on the substrate. The electrodes are disposed so that distances between the electrodes of different sensors are influenced oppositely when the lever element is pivoted. Also, an actuator is provided for applying an actuating force between the lever element and the substrate.
Public/Granted literature
- US20200088598A1 LINEARIZED MICROMECHANICAL SENSOR Public/Granted day:2020-03-19
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