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公开(公告)号：US11519803B2
公开(公告)日：2022-12-06
申请号：US16626097
申请日：2018-06-14
Applicant: Robert Bosch GmbH
Inventor： Arne Dannenberg , Stephan Oppl
Abstract: A method for manufacturing a micromechanical sensor, in particular a pressure difference sensor, including creating a functional layer on a substrate; creating at least one rear side trench area proceeding from a rear side of a substrate, for exposing the functional layer for a sensor diaphragm; creating at least one front side trench area for forming at least one supporting structure, in particular an energy storage structure, preferably in the form of a spring structure, in the substrate as a mounting for the sensor diaphragm; and at least partially filling at least a front side trench area with a gel.
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公开(公告)号：US11326969B2
公开(公告)日：2022-05-10
申请号：US16471221
申请日：2017-12-08
Applicant: Robert Bosch GmbH
Inventor： Stefan Zehringer , Andreas Duell , Arne Dannenberg , Helmut Grutzeck , Jochen Franz , Mike Schwarz , Soeren Zimmermann , Stephan Oppl
Abstract: A micromechanical sensor includes a substrate having a cavity; a flexible diaphragm spanning the cavity; and a lever element that spans the diaphragm and has a first and second end section on opposite sides of a center section. A first joint element is between the first end section and the substrate and a second joint element is between the center section and the diaphragm. The lever element can be pivoted due to a deflection of the diaphragm. Two capacitive sensors are provided, each having two electrodes, one electrode of each sensor being mounted at one of the end sections of the lever element, and the other being mounted on the substrate. The electrodes are disposed so that distances between the electrodes of different sensors are influenced oppositely when the lever element is pivoted. Also, an actuator is provided for applying an actuating force between the lever element and the substrate.
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公开(公告)号：US20200209089A1
公开(公告)日：2020-07-02
申请号：US16626097
申请日：2018-06-14
Applicant: Robert Bosch GmbH
Inventor： Arne Dannenberg , Stephan Oppl
Abstract: A method for manufacturing a micromechanical sensor, in particular a pressure difference sensor, including creating a functional layer on a substrate; creating at least one rear side trench area proceeding from a rear side of a substrate, for exposing the functional layer for a sensor diaphragm; creating at least one front side trench area for forming at least one supporting structure, in particular an energy storage structure, preferably in the form of a spring structure, in the substrate as a mounting for the sensor diaphragm; and at least partially filling at least a front side trench area with a gel.
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公开(公告)号：US20200088598A1
公开(公告)日：2020-03-19
申请号：US16471221
申请日：2017-12-08
Applicant: Robert Bosch GmbH
Inventor： Stefan Zehringer , Andreas Duell , Arne Dannenberg , Helmut Grutzeck , Jochen Franz , Mike Schwarz , Soeren Zimmermann , Stephan Oppl
Abstract: A micromechanical sensor includes a substrate having a cavity; a flexible diaphragm that spans the cavity; and a lever element that spans the diaphragm and has a first and a second end section, the end sections lying on opposite sides of a center section. A first joint element is fitted between the first end section and the substrate and a second joint element is fitted between the center section and the diaphragm, so that the lever element is able to be pivoted due to a deflection of the diaphragm. In addition, two capacitive sensors are provided, each having two electrodes, one electrode of each sensor being mounted at one of the end sections of the lever element, and the other being mounted on the substrate. The electrodes of the sensors are disposed in such a way that distances between the electrodes of different sensors are influenced oppositely when the lever element is pivoted. Moreover, the sensor includes an actuator for applying an actuating force between the lever element and the substrate.
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