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公开(公告)号：US20170108693A1
公开(公告)日：2017-04-20
申请号：US15317214
申请日：2015-05-29
Applicant: Robert Bosch GmbH
Inventor： Rainer Straub , Johannes Baader , Andreas Duell , Frederic Njikam Njimonzie , Joerg Muchow , Helmut Grutzeck
CPC classification number: G02B26/085 , B81B3/0054 , B81B2201/04 , B81B2201/042 , B81B2203/051 , B81B2203/058 , G02B26/105 , G03B21/2066
Abstract: A micromirror device including a drive unit, which includes a movable drive element, which is situated in a first plane, and a guiding device, and a mirror, which is elastically coupled to the drive element and is situated in the idle position in a second plane, which is in parallel to the first plane, the guiding device being designed to guide a movement of the drive element on a straight line situated in the first plane. Furthermore, a corresponding projection device is described.
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公开(公告)号：US11326969B2
公开(公告)日：2022-05-10
申请号：US16471221
申请日：2017-12-08
Applicant: Robert Bosch GmbH
Inventor： Stefan Zehringer , Andreas Duell , Arne Dannenberg , Helmut Grutzeck , Jochen Franz , Mike Schwarz , Soeren Zimmermann , Stephan Oppl
Abstract: A micromechanical sensor includes a substrate having a cavity; a flexible diaphragm spanning the cavity; and a lever element that spans the diaphragm and has a first and second end section on opposite sides of a center section. A first joint element is between the first end section and the substrate and a second joint element is between the center section and the diaphragm. The lever element can be pivoted due to a deflection of the diaphragm. Two capacitive sensors are provided, each having two electrodes, one electrode of each sensor being mounted at one of the end sections of the lever element, and the other being mounted on the substrate. The electrodes are disposed so that distances between the electrodes of different sensors are influenced oppositely when the lever element is pivoted. Also, an actuator is provided for applying an actuating force between the lever element and the substrate.
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3.发明授权Micromechanical component including an integrated photodiode and a microprojector 有权微机械部件包括集成光电二极管和微型喷射器公开(公告)号：US09503673B2
公开(公告)日：2016-11-22
申请号：US14513440
申请日：2014-10-14
Applicant: Robert Bosch GmbH
Inventor： Sebastian Reiss , Frederic Njikam Njimonzie , Andreas Duell , Frank Fischer
CPC classification number: H04N5/7458 , B41J2/442 , B41J2/473 , G02B26/0833 , H01L31/02325 , H04N1/04 , H04N9/3129 , H04N9/3182 , H04N9/3194
Abstract: A micromechanical component includes: at least one micromirror; and an integrated photodiode. The micromechanical component is part of a microprojector which further includes a light source. The integrated photodiode of the micromechanical component receives light from the light source.
Abstract translation: 微机械部件包括：至少一个微镜; 和集成光电二极管。 微机械部件是进一步包括光源的微型喷射器的一部分。 微机械部件的集成光电二极管接收来自光源的光。
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公开(公告)号：US09935077B2
公开(公告)日：2018-04-03
申请号：US14620952
申请日：2015-02-12
Applicant: Robert Bosch GmbH
Inventor： Ralf Hausner , Andreas Duell , Johannes Baader , Rainer Straub
CPC classification number: H01L24/741 , H01L24/29 , H01L24/32 , H01L24/80 , H01L24/83 , H01L2224/26145 , H01L2224/26175 , H01L2224/29011 , H01L2224/29013 , H01L2224/29117 , H01L2224/29124 , H01L2224/3205 , H01L2224/32225 , H01L2224/32502 , H01L2224/32506 , H01L2224/749 , H01L2224/80 , H01L2224/83007 , H01L2224/83193 , H01L2224/83203 , H01L2224/83805 , H01L2924/1461 , Y10T403/479 , H01L2924/01032 , H01L2924/00014 , H01L2924/00012
Abstract: An apparatus for eutectic bonding includes (a) a bonding frame that includes two substrates and (b) a frame device situated on the substrates, the frame device including two frames, the apparatus being usable to develop a eutectic, formed during bonding, in a spatially defined manner, whereby a volume formed by the frames and the substrates can be filled up completely with the eutectic.
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5.发明申请Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting 有权具有气密性通过接触的微机械部件，以及具有气密性通过接触的微机械部件的制造方法公开(公告)号：US20150232330A1
公开(公告)日：2015-08-20
申请号：US14614053
申请日：2015-02-04
Applicant: Robert Bosch GmbH
Inventor： Jochen FRANZ , Simon Armbruster , Helmut Grutzeck , Joerg Muchow , Frederic Njikam Njimonzie , Andreas Duell , Johannes Baader , Stefan Liebing , Rainer Straub
CPC classification number: B81C1/00277 , B81B7/0035 , B81B7/007 , B81B2207/095 , B81B2207/097 , B81C2203/0109
Abstract: A micromechanical component includes: a hermetically sealed housing; a first functional element that is situated inside the housing; a first structured electrically conductive layer that contacts the first functional element and that is situated inside the housing; and a second structured electrically conductive layer, the first conductive layer being electrically contacted via the second conductive layer, and the second conductive layer being electrically contacted laterally through the housing via a hermetic through-contacting in the second conductive layer.
Abstract translation: 微机械部件包括：密封的壳体; 位于壳体内的第一功能元件; 第一结构化导电层，其接触所述第一功能元件并位于所述壳体内; 以及第二结构化导电层，所述第一导电层经由所述第二导电层电接触，并且所述第二导电层通过所述第二导电层中的气密通过所述壳体横向地电接触。
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Patent Agency Ranking
公开(公告)号：US20200088598A1
公开(公告)日：2020-03-19
申请号：US16471221
申请日：2017-12-08
Applicant: Robert Bosch GmbH
Inventor： Stefan Zehringer , Andreas Duell , Arne Dannenberg , Helmut Grutzeck , Jochen Franz , Mike Schwarz , Soeren Zimmermann , Stephan Oppl
Abstract: A micromechanical sensor includes a substrate having a cavity; a flexible diaphragm that spans the cavity; and a lever element that spans the diaphragm and has a first and a second end section, the end sections lying on opposite sides of a center section. A first joint element is fitted between the first end section and the substrate and a second joint element is fitted between the center section and the diaphragm, so that the lever element is able to be pivoted due to a deflection of the diaphragm. In addition, two capacitive sensors are provided, each having two electrodes, one electrode of each sensor being mounted at one of the end sections of the lever element, and the other being mounted on the substrate. The electrodes of the sensors are disposed in such a way that distances between the electrodes of different sensors are influenced oppositely when the lever element is pivoted. Moreover, the sensor includes an actuator for applying an actuating force between the lever element and the substrate.
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公开(公告)号：US10001643B2
公开(公告)日：2018-06-19
申请号：US15317214
申请日：2015-05-29
Applicant: Robert Bosch GmbH
Inventor： Rainer Straub , Johannes Baader , Andreas Duell , Frederic Njikam Njimonzie , Joerg Muchow , Helmut Grutzeck
CPC classification number: G02B26/085 , B81B3/0054 , B81B2201/042 , B81B2203/058 , G02B26/105 , G03B21/2066
Abstract: A micromirror device including a drive unit, which includes a movable drive element, which is situated in a first plane, and a guiding device, and a mirror, which is elastically coupled to the drive element and is situated in the idle position in a second plane, which is in parallel to the first plane, the guiding device being designed to guide a movement of the drive element on a straight line situated in the first plane. Furthermore, a corresponding projection device is described.
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公开(公告)号：US10222609B2
公开(公告)日：2019-03-05
申请号：US15318523
申请日：2015-05-29
Applicant: Robert Bosch GmbH
Inventor： Rainer Straub , Stefan Pinter , Johannes Baader , Andreas Duell , Frederic Njikam Njimonzie , Joerg Muchow , Helmut Grutzeck , Stefan Mark
Abstract: A micromirror assembly is described as including a spring-mounted mirror and at least one stop unit, which is designed to restrict a movement of the mirror in the event of a movement of the mirror in a predefined direction out of its idle position. Furthermore, the invention relates to a projection device.
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公开(公告)号：US09725311B2
公开(公告)日：2017-08-08
申请号：US14614053
申请日：2015-02-04
Applicant: Robert Bosch GmbH
Inventor： Jochen Franz , Simon Armbruster , Helmut Grutzeck , Joerg Muchow , Frederic Njikam Njimonzie , Andreas Duell , Johannes Baader , Stefan Liebing , Rainer Straub
CPC classification number: B81C1/00277 , B81B7/0035 , B81B7/007 , B81B2207/095 , B81B2207/097 , B81C2203/0109
Abstract: A micromechanical component includes: a hermetically sealed housing; a first functional element that is situated inside the housing; a first structured electrically conductive layer that contacts the first functional element and that is situated inside the housing; and a second structured electrically conductive layer, the first conductive layer being electrically contacted via the second conductive layer, and the second conductive layer being electrically contacted laterally through the housing via a hermetic through-contacting in the second conductive layer.
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公开(公告)号：US20170146792A1
公开(公告)日：2017-05-25
申请号：US15318523
申请日：2015-05-29
Applicant: Robert Bosch GmbH
Inventor： Rainer Straub , Stefan Pinter , Johannes Baader , Andreas Duell , Frederic Njikam Njimonzie , Joerg Muchow , Helmut Grutzeck , Stefan Mark
CPC classification number: G02B26/085 , B81B3/004 , B81B3/0051 , B81B2201/042 , G02B26/105 , H04N9/312
Abstract: A micromirror assembly is described as including a spring-mounted mirror and at least one stop unit, which is designed to restrict a movement of the mirror in the event of a movement of the mirror in a predefined direction out of its idle position. Furthermore, the invention relates to a projection device.
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