Invention Grant
- Patent Title: Silicon carbide ultraviolet light photodetector
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Application No.: US16370636Application Date: 2019-03-29
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Publication No.: US11335823B2Publication Date: 2022-05-17
- Inventor: Antonello Santangelo , Massimo Cataldo Mazzillo , Salvatore Cascino , Giuseppe Longo , Antonella Sciuto
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102018000004149 20180330
- Main IPC: H01L31/0352
- IPC: H01L31/0352 ; H01L31/107 ; H01L31/0312 ; H01L27/146 ; H01L31/18 ; H01L31/0216 ; H01L31/028 ; H01L27/144

Abstract:
The photodetector is formed in a silicon carbide body formed by a first epitaxial layer of an N type and a second epitaxial layer of a P type. The first and second epitaxial layers are arranged on each other and form a body surface including a projecting portion, a sloped lateral portion, and an edge portion. An insulating edge region extends over the sloped lateral portion and the edge portion. An anode region is formed by the second epitaxial layer and is delimited by the projecting portion and by the sloped lateral portion. The first epitaxial layer forms a cathode region underneath the anode region. A buried region of an N type, with a higher doping level than the first epitaxial layer, extends between the anode and cathode regions, underneath the projecting portion, at a distance from the sloped lateral portion as well as from the edge region.
Public/Granted literature
- US20190305159A1 SILICON CARBIDE ULTRAVIOLET LIGHT PHOTODETECTOR AND MANUFACTURING PROCESS THEREOF Public/Granted day:2019-10-03
Information query
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