Invention Grant
- Patent Title: Polishing composition
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Application No.: US16961619Application Date: 2018-12-21
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Publication No.: US11339311B2Publication Date: 2022-05-24
- Inventor: Yasuaki Ito , Naoto Noguchi
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu
- Agency: Katten Muchin Rosenman LLP
- Priority: JPJP2018-002847 20180111,JPJP2018-176787 20180921
- International Application: PCT/JP2018/047189 WO 20181221
- International Announcement: WO2019/138846 WO 20190718
- Main IPC: C09G1/02
- IPC: C09G1/02 ; H01L21/306 ; H01L29/16 ; H01L29/20

Abstract:
The present invention provides a polishing composition with which polishing rates can be effectively improved and which is for polishing works to be polished. The polishing composition comprises water, abrasive grains, an oxidant, and a polishing accelerator. The polishing accelerator comprises at least one metal salt selected from the group consisting of alkali metal salts and alkaline-earth metal salts.
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