Invention Grant
- Patent Title: Detector cell for a photoacoustic gas sensor and photoacoustic gas sensor
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Application No.: US16935726Application Date: 2020-07-22
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Publication No.: US11346767B2Publication Date: 2022-05-31
- Inventor: Tobias Mittereder , Christoph Glacer
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: EP19193158 20190822
- Main IPC: G01N21/17
- IPC: G01N21/17 ; G01N33/00
Abstract:
A detector cell for a photoacoustic gas sensor comprises a first layer structure, a second layer structure arranged at the first layer structure and comprising a membrane structure, and a third layer structure arranged at the second layer structure. The first layer structure and the third layer structure hermetically enclose a cavity, wherein the membrane structure is arranged in the cavity.
Public/Granted literature
- US20210055207A1 DETECTOR CELL FOR A PHOTOACOUSTIC GAS SENSOR AND PHOTOACOUSTIC GAS SENSOR Public/Granted day:2021-02-25
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