公开(公告)号：US20220228974A1

公开(公告)日：2022-07-21

申请号：US17658544

申请日：2022-04-08

Applicant: Infineon Technologies AG

Inventor： Tobias Mittereder ,  Christoph Glacer

IPC: G01N21/17 ,  G01N33/00

Abstract: A detector cell for a photoacoustic gas sensor comprises a first layer structure, a second layer structure arranged at the first layer structure and comprising a membrane structure, and a third layer structure arranged at the second layer structure. The first layer structure and the third layer structure hermetically enclose a cavity, wherein the membrane structure is arranged in the cavity.

公开(公告)号：US11346767B2

公开(公告)日：2022-05-31

申请号：US16935726

申请日：2020-07-22

Applicant: Infineon Technologies AG

Inventor： Tobias Mittereder ,  Christoph Glacer

IPC: G01N21/17 ,  G01N33/00

Abstract: A detector cell for a photoacoustic gas sensor comprises a first layer structure, a second layer structure arranged at the first layer structure and comprising a membrane structure, and a third layer structure arranged at the second layer structure. The first layer structure and the third layer structure hermetically enclose a cavity, wherein the membrane structure is arranged in the cavity.

公开(公告)号：US20210055207A1

公开(公告)日：2021-02-25

申请号：US16935726

申请日：2020-07-22

Applicant: Infineon Technologies AG

Inventor： Tobias Mittereder ,  Christoph Glacer

IPC: G01N21/17 ,  G01N33/00

Abstract: A detector cell for a photoacoustic gas sensor comprises a first layer structure, a second layer structure arranged at the first layer structure and comprising a membrane structure, and a third layer structure arranged at the second layer structure. The first layer structure and the third layer structure hermetically enclose a cavity, wherein the membrane structure is arranged in the cavity.

公开(公告)号：US20250102422A1

公开(公告)日：2025-03-27

申请号：US18830121

申请日：2024-09-10

Applicant: Infineon Technologies AG

Inventor： Michael Hauff ,  David Tumpold ,  Tobias Mittereder ,  Mohammadamir Ghaderi ,  Stefan Hampl ,  Alfred Sigl ,  Sebastian Schwagerl

IPC: G01N21/17 ,  H01L31/12

Abstract: In accordance with an embodiment, a semiconductor device includes: a radiator comprising a radiation layer configured to radiate an electromagnetic wave; a detector comprising a detection layer configured to detect the electromagnetic wave; a substrate; and an interface layer arranged between the radiator or the detector and the substrate, where a thermal conductivity of the radiator or the detector is different from a thermal conductivity of the interface layer.

公开(公告)号：US20240288363A1

公开(公告)日：2024-08-29

申请号：US18582173

申请日：2024-02-20

Applicant: Infineon Technologies AG

Inventor： Christoph Glacer ,  Ulrich Krumbein ,  Tobias Mittereder ,  Mark Pavier ,  Siyuan Qi ,  Hugh Richard ,  David Tumpold ,  Paul Westmarland

IPC: G01N21/3504

CPC classification number: G01N21/3504

Abstract: A package for an optical radiation device comprises a base structure having arranged thereon an optical radiation device, an optically transparent lid element bonded to the base structure defining a cavity between the base structure and the lid element, and a bond structure in a bonding region between the base structure and the lid element, wherein the bond structure is arranged to provide an adhesive bond between the base structure and the lid element, and wherein the bond structure comprises a diffusion layer having a gas diffusive material or gas diffusive structure for providing a gas diffusion path between the cavity and the surrounding atmosphere.

公开(公告)号：US12000772B2

公开(公告)日：2024-06-04

申请号：US17658544

申请日：2022-04-08

Applicant: Infineon Technologies AG

Inventor： Tobias Mittereder ,  Christoph Glacer

IPC: G01N21/17 ,  G01N33/00

CPC classification number: G01N21/1702 ,  G01N33/004 ,  G01N2021/1704 ,  G01N2021/1708 ,  G01N2223/508

Abstract: A detector cell for a photoacoustic gas sensor comprises a first layer structure, a second layer structure arranged at the first layer structure and comprising a membrane structure, and a third layer structure arranged at the second layer structure. The first layer structure and the third layer structure hermetically enclose a cavity, wherein the membrane structure is arranged in the cavity.