Invention Grant
- Patent Title: Impedance matching apparatus and control method
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Application No.: US17012168Application Date: 2020-09-04
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Publication No.: US11348761B2Publication Date: 2022-05-31
- Inventor: John Carroll , Jianping Zhao , Peter Ventzek , Barton Lane
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Slater Matsil, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/46

Abstract:
A system includes a plasma chamber coupled to a power source, and an impedance matching network coupled between the power source and the plasma chamber, wherein the impedance matching network comprises an L-shaped network and a first adjustable inductor coupled between an input of the plasma chamber and ground, and wherein the impedance matching network is configured such that, in a predetermined frequency range, an impedance of the impedance matching network and the plasma chamber is substantially equal to an impedance of the power source.
Public/Granted literature
- US20220076923A1 Impedance Matching Apparatus and Control Method Public/Granted day:2022-03-10
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