- Patent Title: Plasma processing apparatus having a focus ring adjustment assembly
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Application No.: US15930874Application Date: 2020-05-13
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Publication No.: US11348767B2Publication Date: 2022-05-31
- Inventor: Martin L. Zucker , Peter J. Lembesis , Ryan M. Pakulski , Shawming Ma
- Applicant: Mattson Technology, Inc. , Beijing E-Town Semiconductor Technology Co., Ltd.
- Applicant Address: US CA Fremont; CN Beijing
- Assignee: Mattson Technology, Inc.,Beijing E-Town Semiconductor Technology Co., Ltd.
- Current Assignee: Mattson Technology, Inc.,Beijing E-Town Semiconductor Technology Co., Ltd.
- Current Assignee Address: US CA Fremont; CN Beijing
- Agency: Dority & Manning, P.A.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/68 ; H01L21/203 ; H01L21/677 ; B25J11/00 ; B25J15/00 ; H01L21/67 ; H01L21/683 ; H01L21/687

Abstract:
A plasma processing apparatus is provided. The plasma processing apparatus includes a processing chamber defining a vertical direction and a lateral direction. The plasma processing apparatus includes a pedestal disposed within the processing chamber. The pedestal is configured to support the substrate. The plasma processing apparatus includes a radio frequency (RF) disposed within the processing chamber. The RF bias electrode defines a RF zone extending between a first end of the RF bias electrode and a second end of the RF bias electrode along the lateral direction. The plasma processing apparatus includes a focus ring disposed within the processing chamber. The plasma processing apparatus further includes a focus ring adjustment assembly. The focus ring adjustment assembly includes a lift pin positioned outside of the RF zone. The lift pin is movable along the vertical direction to adjust a distance between the pedestal and the focus ring along the vertical direction.
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