Invention Grant
- Patent Title: Bonding apparatus and bonding method
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Application No.: US16884291Application Date: 2020-05-27
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Publication No.: US11348791B2Publication Date: 2022-05-31
- Inventor: Toshifumi Inamasu , Shinichi Shinozuka
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JPJP2019-099179 20190528
- Main IPC: H01L21/18
- IPC: H01L21/18 ; H01L21/67 ; B23Q17/24 ; B23P19/10 ; B23P21/00 ; B23Q17/22

Abstract:
A bonding apparatus configured to bond a first substrate and a second substrate includes a first holder configured to hold the first substrate; a second holder configured to hold the second substrate; a first imaging device provided at the first holder and configured to image the second substrate held by the second holder; a first light irradiating device provided at the first holder and configured to irradiate light to the second substrate when the second substrate is imaged; a second imaging device provided at the second holder and configured to image the first substrate held by the first holder; and a second light irradiating device provided at the second holder and configured to irradiate light to the first substrate when the first substrate is imaged. Each of the first light irradiating device and the second light irradiating device is connected to a first light source configured to irradiate white light.
Public/Granted literature
- US20200381255A1 BONDING APPARATUS AND BONDING METHOD Public/Granted day:2020-12-03
Information query
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