Invention Grant
- Patent Title: Stage driving system and apparatus or device such as apparatus of charged-particle beam comprising the same
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Application No.: US17444192Application Date: 2021-08-01
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Publication No.: US11355312B2Publication Date: 2022-06-07
- Inventor: Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
- Applicant: Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
- Applicant Address: US CA Los Altos Hills; US CA Sunnyvale; US CA Fremont; US CA Fremont
- Assignee: Zhongwei Chen,Xiaoming Chen,Daniel Tang,Liang-Fu Fan
- Current Assignee: Zhongwei Chen,Xiaoming Chen,Daniel Tang,Liang-Fu Fan
- Current Assignee Address: US CA Los Altos Hills; US CA Sunnyvale; US CA Fremont; US CA Fremont
- Agency: United States Research and Patent Firm
- Agent George Guosheng Wang
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/20 ; H01J37/317 ; H01J37/141

Abstract:
The present invention provides a driving system comprising two actuators for moving a stage through two elastic connectors; and a general apparatus/device comprising such a driving system, such as a machine tool, an analytical instrument, an optical microscope, and an apparatus of charged-particle beam such as electron microscope and an electron beam lithographical apparatus. When used in an electron microscope, the stage can be used as a specimen stage or a plate having apertures for electron beam to pass through. The novel stage driving system exhibits numerous technical merits such as simpler structure, better manufacturability, improved cost-effectiveness, and higher reliability, among others.
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