- 专利标题: Line-based endpoint detection
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申请号: US16917727申请日: 2020-06-30
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公开(公告)号: US11355313B2公开(公告)日: 2022-06-07
- 发明人: Brian Routh, Jr. , Brad Larson , Aditee Shrotre , Oleg Sidorov
- 申请人: FEI Company
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 主分类号: H01J37/30
- IPC分类号: H01J37/30 ; H01J37/31 ; G01N23/2251
摘要:
Apparatuses and methods directed toward endpoint detection are disclosed herein. An example method at least includes forming a plurality of lines on a top surface of a sample; removing, a plurality of times, material from a working surface of the sample, the working surface different than the top surface; imaging, a plurality of times, the sample to at least capture the plurality of lines; and determining an endpoint based on a relative spatial characteristic between two or more lines of the plurality of lines.
公开/授权文献
- US20210407765A1 LINE-BASED ENDPOINT DETECTION 公开/授权日:2021-12-30
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