公开(公告)号：US11847813B2

公开(公告)日：2023-12-19

申请号：US17499603

申请日：2021-10-12

申请人： FEI Company

发明人： Thomas Gary Miller ,  John F. Flanagan, IV ,  Brian Routh, Jr. ,  Richard Young ,  Brad Larson ,  Aditee Shrotre

IPC分类号： G06N3/00 ,  G06N20/00 ,  G06T7/00 ,  G06V10/764 ,  G06V10/44 ,  H01L21/66 ,  H01L21/268 ,  H01L21/263 ,  G06F18/24 ,  G06F18/2115 ,  G06F18/21

CPC分类号： G06V10/454 ,  G06F18/2115 ,  G06F18/2163 ,  G06F18/24 ,  G06T7/0004 ,  G06V10/764 ,  H01L21/2633 ,  H01L21/2686 ,  H01L22/26 ,  G06T2207/10056 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148 ,  G06V2201/06

摘要： Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.

公开(公告)号：US11069509B1

公开(公告)日：2021-07-20

申请号：US16819945

申请日：2020-03-16

申请人： FEI Company

发明人： James Clarke ,  Brian Routh, Jr. ,  Micah LeDoux ,  Cliff Bugge

IPC分类号： H01J37/304 ,  H01J37/305 ,  G01N1/32 ,  G01N23/2202 ,  H01J37/22 ,  H01J37/28 ,  G01N23/2251

摘要： The backside of a planar view lamella is prepared from a sample extracted from a workpiece. The sample includes multiple device layers and a substrate layer. After removing at least a part of the substrate layer covering a final device layer to obtain a sample surface, a region of interest (ROI) relative to the sample surface is alternately scanned with an electron beam and spontaneously etched until the final device layer within the ROI is exposed. One or more device layers may be removed from the sample backside after the final device layer is exposed to obtain the backside of the planar view lamella.

公开(公告)号：US11176656B2

公开(公告)日：2021-11-16

申请号：US16409477

申请日：2019-05-10

申请人： FEI Company

发明人： Thomas Gary Miller ,  John F. Flanagan, IV ,  Brian Routh, Jr. ,  Richard Young ,  Brad Larson ,  Aditee Shrotre

IPC分类号： G06T7/00 ,  G06K9/62 ,  H01L21/26 ,  C23F1/04 ,  G06N3/04 ,  G06N20/00 ,  H01L21/66 ,  H01L21/268 ,  H01L21/263

摘要： Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.

公开(公告)号：US11355313B2

公开(公告)日：2022-06-07

申请号：US16917727

申请日：2020-06-30

申请人： FEI Company

发明人： Brian Routh, Jr. ,  Brad Larson ,  Aditee Shrotre ,  Oleg Sidorov

IPC分类号： H01J37/30 ,  H01J37/31 ,  G01N23/2251

摘要： Apparatuses and methods directed toward endpoint detection are disclosed herein. An example method at least includes forming a plurality of lines on a top surface of a sample; removing, a plurality of times, material from a working surface of the sample, the working surface different than the top surface; imaging, a plurality of times, the sample to at least capture the plurality of lines; and determining an endpoint based on a relative spatial characteristic between two or more lines of the plurality of lines.