Invention Grant
- Patent Title: Forming self-aligned multi-metal interconnects
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Application No.: US16409379Application Date: 2019-05-10
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Publication No.: US11355442B2Publication Date: 2022-06-07
- Inventor: Ashim Dutta , Ekmini Anuja De Silva
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Abdy Raissinia
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/538 ; H01L23/532

Abstract:
An interconnect structure is provided. The interconnect structure includes first conducting lines and second conducting lines. The first conducting lines are formed of a first metallic material and include at least one individual first conducting line in contact with a first corresponding substrate conducting line. The second conducting lines are formed of a second metallic material and include at least one individual second conducting line between neighboring first conducting lines and in contact with a second corresponding substrate conducting line. The at least one individual second conducting line is separated from each of the neighboring first conducting lines by controlled distances.
Information query
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