- Patent Title: Non-volatile memory device and method for manufacturing the same
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Application No.: US16831846Application Date: 2020-03-27
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Publication No.: US11362186B2Publication Date: 2022-06-14
- Inventor: Kuo-Lung Li , Chih-Hao Pan , Szu-Ping Wang , Po-Hsuan Chen , Chi-Cheng Huang
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Priority: CN202010108951.6 20200221
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L27/1157 ; H01L29/66 ; H01L27/11573 ; H01L29/792 ; H01L21/28

Abstract:
A non-volatile memory device is provided. The non-volatile memory device includes a substrate, a first gate structure disposed on the substrate, a second gate structure disposed on the substrate, and a memory gate structure disposed on the substrate and between the first gate structure and the second gate structure. The memory gate structure at least covers the first gate structure and the second gate structure. The memory gate structure includes a charge storage layer disposed on the substrate and a memory gate layer disposed on the charge storage layer.
Public/Granted literature
- US20210265474A1 NON-VOLATILE MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2021-08-26
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