Invention Grant
- Patent Title: Programmable and reconfigurable mask with MEMS micro-mirror array for defect detection
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Application No.: US17005151Application Date: 2020-08-27
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Publication No.: US11366307B2Publication Date: 2022-06-21
- Inventor: Hongxing Yuan , Tim Mahatdejkul , Bret Whiteside
- Applicant: KLA Corporation
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Agency: Suiter Swantz pc llo
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G03F7/20

Abstract:
A defect detection system includes a programmable and reconfigurable digital micro-mirror device (DMD) and at least one optical element. The DMD includes a micro-mirror array with a plurality of micro-mirrors adjustable to achieve a first deflection state or a second deflection state. The DMD is configured to receive incoming light and reflect a first portion of the incoming light into a first light channel corresponding to the first deflection state and a second portion of the incoming light into a second light channel corresponding to the second deflection state. The at least one optical element is optically coupled to the first light channel and the second light channel. The at least one optical element is configured to deflect the first portion of the incoming light to a first imaging lens and a second portion of the incoming light to a second imaging lens.
Public/Granted literature
- US20220066195A1 Programmable and Reconfigurable Mask with MEMS Micro-Mirror Array for Defect Detection Public/Granted day:2022-03-03
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