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公开(公告)号：US20230187241A1
公开(公告)日：2023-06-15
申请号：US17829289
申请日：2022-05-31
Applicant: KLA Corporation
Inventor： Chong Shen , Guoheng Zhao , Bret Whiteside
CPC classification number: H01L21/67288 , G02B5/1833 , G02B5/1819 , G01N21/8806 , G01N21/9501 , G01N2021/8848
Abstract: An optical inspection system includes one or more single-material gratings to convert the polarization of light scattered from a target from an elliptical polarization that varies spatially across a collection pupil to a linear polarization that is uniformly oriented across the collection pupil. The one or more single-material gratings have phase retardation that varies spatially across the collection pupil in accordance with the elliptical polarization. The optical inspection system also includes a linear polarizer to filter out the linearly polarized light.
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公开(公告)号：US20210356406A1
公开(公告)日：2021-11-18
申请号：US17313703
申请日：2021-05-06
Applicant: KLA Corporation
Inventor： Anatoly Romanovsky , Jenn-Kuen Leong , Daniel Kavaldjiev , Chunhai Wang , Bret Whiteside , Steve Xu
IPC: G01N21/88
Abstract: A dark-field optical system may include a rotational objective lens assembly with a dark-field objective lens to collect light from a sample within a collection numerical aperture, where the dark-field objective lens includes an entrance aperture and an exit aperture at symmetrically-opposed azimuth angles with respect to an optical axis, a rotational bearing to allow rotation of at least a part of the dark-field objective lens including the entrance aperture and the exit aperture around the optical axis, and a rotational driver to control a rotational angle of the entrance aperture. The system may also include a multi-angle illumination sub-system to illuminate the sample with an illumination beam through the entrance aperture at two or more illumination azimuth angles, where an azimuth angle of the illumination beam on the sample is selectable by rotating the objective lens to any of the two or more illumination azimuth angles.
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公开(公告)号：US20200132608A1
公开(公告)日：2020-04-30
申请号：US16584370
申请日：2019-09-26
Applicant: KLA CORPORATION
Inventor： Raymond Chu , Andrew Zeng , Donald Pettibone , Chunsheng Huang , Bret Whiteside , Fabrice Paccoret , Xuan Wang , Chuanyong Huang , Steve Xu , Anatoly Romanovsky
Abstract: The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives the light from the light source. The light from the polarizer is directed at a Wollaston prism, such as through a half wave plate. Use of the TDI-CCD sensor and the dark field/bright field sensor provide high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.
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Patent Agency Ranking
公开(公告)号：US11733172B2
公开(公告)日：2023-08-22
申请号：US17313703
申请日：2021-05-06
Applicant: KLA Corporation
Inventor： Anatoly Romanovsky , Jenn-Kuen Leong , Daniel Kavaldjiev , Chunhai Wang , Bret Whiteside , Zhiwei Xu
IPC: G01N21/88
CPC classification number: G01N21/8806 , G01N2021/8822 , G01N2201/063
Abstract: A dark-field optical system may include a rotational objective lens assembly with a dark-field objective lens to collect light from a sample within a collection numerical aperture, where the dark-field objective lens includes an entrance aperture and an exit aperture at symmetrically-opposed azimuth angles with respect to an optical axis, a rotational bearing to allow rotation of at least a part of the dark-field objective lens including the entrance aperture and the exit aperture around the optical axis, and a rotational driver to control a rotational angle of the entrance aperture. The system may also include a multi-angle illumination sub-system to illuminate the sample with an illumination beam through the entrance aperture at two or more illumination azimuth angles, where an azimuth angle of the illumination beam on the sample is selectable by rotating the objective lens to any of the two or more illumination azimuth angles.
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公开(公告)号：US20220066195A1
公开(公告)日：2022-03-03
申请号：US17005151
申请日：2020-08-27
Applicant: KLA Corporation
Inventor： Hongxing Yuan , Tim Mahatdejkul , Bret Whiteside
Abstract: A defect detection system includes a programmable and reconfigurable digital micro-mirror device (DMD) and at least one optical element. The DMD includes a micro-mirror array with a plurality of micro-mirrors adjustable to achieve a first deflection state or a second deflection state. The DMD is configured to receive incoming light and reflect a first portion of the incoming light into a first light channel corresponding to the first deflection state and a second portion of the incoming light into a second light channel corresponding to the second deflection state. The at least one optical element is optically coupled to the first light channel and the second light channel. The at least one optical element is configured to deflect the first portion of the incoming light to a first imaging lens and a second portion of the incoming light to a second imaging lens.
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公开(公告)号：US11366307B2
公开(公告)日：2022-06-21
申请号：US17005151
申请日：2020-08-27
Applicant: KLA Corporation
Inventor： Hongxing Yuan , Tim Mahatdejkul , Bret Whiteside
Abstract: A defect detection system includes a programmable and reconfigurable digital micro-mirror device (DMD) and at least one optical element. The DMD includes a micro-mirror array with a plurality of micro-mirrors adjustable to achieve a first deflection state or a second deflection state. The DMD is configured to receive incoming light and reflect a first portion of the incoming light into a first light channel corresponding to the first deflection state and a second portion of the incoming light into a second light channel corresponding to the second deflection state. The at least one optical element is optically coupled to the first light channel and the second light channel. The at least one optical element is configured to deflect the first portion of the incoming light to a first imaging lens and a second portion of the incoming light to a second imaging lens.
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公开(公告)号：US11181484B1
公开(公告)日：2021-11-23
申请号：US16882603
申请日：2020-05-25
Applicant: KLA CORPORATION
Inventor： Zhiwei Xu , Bret Whiteside , Steve Yifeng Cui , Stephen Biellak
Abstract: Systems, methods, and apparatuses are disclosed herein for directing, using an optical arrangement including one or more lenses, a main beam and a leading beam toward a specimen such that the main beam is incident on the specimen at a main beam incidence and the leading beam is incident on the specimen at a leading beam incidence. The main beam intensity is greater than a leading beam intensity of the leading beam. A TDI sensor receives electromagnetic radiation from the leading beam incidence, thereby generating a first accumulated charge portion, and receives electromagnetic radiation from the main beam incidence, thereby generating a second accumulated charge portion. A processor maps the first accumulated charge portion to a first FOV, thereby yielding leading beam data, and maps the second accumulated charge portion to a second FOV, thereby yielding main beam data.
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公开(公告)号：US20230187242A1
公开(公告)日：2023-06-15
申请号：US17829296
申请日：2022-05-31
Applicant: KLA Corporation
Inventor： Chong Shen , Guoheng Zhao , Bret Whiteside
CPC classification number: H01L21/67288 , G02B5/3083 , G02B5/1814 , G01N21/8806 , G01N21/9501 , G01N2021/8848
Abstract: An optical inspection system includes one or more gratings to convert the polarization of light scattered from a target from an elliptical polarization that varies spatially across a collection pupil to a linear polarization that is uniformly oriented across the collection pupil. The one or more gratings have phase retardation that varies spatially across the collection pupil in accordance with the elliptical polarization. The one or more gratings include at least one grating on a reflective substrate. The optical inspection system also includes a linear polarizer to filter out the linearly polarized light.
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