公开(公告)号：US11366307B2

公开(公告)日：2022-06-21

申请号：US17005151

申请日：2020-08-27

Applicant: KLA Corporation

Inventor： Hongxing Yuan ,  Tim Mahatdejkul ,  Bret Whiteside

IPC: G02B26/08 ,  G03F7/20

Abstract: A defect detection system includes a programmable and reconfigurable digital micro-mirror device (DMD) and at least one optical element. The DMD includes a micro-mirror array with a plurality of micro-mirrors adjustable to achieve a first deflection state or a second deflection state. The DMD is configured to receive incoming light and reflect a first portion of the incoming light into a first light channel corresponding to the first deflection state and a second portion of the incoming light into a second light channel corresponding to the second deflection state. The at least one optical element is optically coupled to the first light channel and the second light channel. The at least one optical element is configured to deflect the first portion of the incoming light to a first imaging lens and a second portion of the incoming light to a second imaging lens.

公开(公告)号：US20220066195A1

公开(公告)日：2022-03-03

申请号：US17005151

申请日：2020-08-27

Applicant: KLA Corporation

Inventor： Hongxing Yuan ,  Tim Mahatdejkul ,  Bret Whiteside

IPC: G02B26/08 ,  G03F7/20

Abstract: A defect detection system includes a programmable and reconfigurable digital micro-mirror device (DMD) and at least one optical element. The DMD includes a micro-mirror array with a plurality of micro-mirrors adjustable to achieve a first deflection state or a second deflection state. The DMD is configured to receive incoming light and reflect a first portion of the incoming light into a first light channel corresponding to the first deflection state and a second portion of the incoming light into a second light channel corresponding to the second deflection state. The at least one optical element is optically coupled to the first light channel and the second light channel. The at least one optical element is configured to deflect the first portion of the incoming light to a first imaging lens and a second portion of the incoming light to a second imaging lens.