- 专利标题: Semiconducting metal oxide memory device using hydrogen-mediated threshold voltage modulation and methods for forming the same
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申请号: US17229748申请日: 2021-04-13
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公开(公告)号: US11430512B2公开(公告)日: 2022-08-30
- 发明人: Marcus Johannes Henricus Van Dal , Gerben Doornbos , Georgios Vellianitis , Blandine Duriez , Mauricio Manfrini
- 申请人: Taiwan Semiconductor Manufacturing Company Limited
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人地址: TW Hsinchu
- 代理机构: The Marbury Law Group, PLLC
- 主分类号: G11C11/00
- IPC分类号: G11C11/00 ; G11C13/00 ; H01L27/24 ; H01L45/00
摘要:
A memory device is provided, which may include a first electrode, a memory layer stack including at least one semiconducting metal oxide layer and at least one hydrogen-containing metal layer, and a second electrode. A semiconductor device is provided, which may include a semiconducting metal oxide layer containing a source region, a drain region, and a channel region, a hydrogen-containing metal layer located on a surface of the channel region, and a gate electrode located on the hydrogen-containing metal layer. Each hydrogen-containing metal layer may include at least one metal selected from platinum, iridium, osmium, and ruthenium at an atomic percentage that is at least 90%, and may include hydrogen atoms at an atomic percentage in a range from 0.001% to 10%. Hydrogen atoms may be reversibly impregnated into a respective semiconducting metal oxide layer to change resistivity and to encode a memory bit.
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