Invention Grant
- Patent Title: Acoustic resonator and method of manufacturing thereof
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Application No.: US16391650Application Date: 2019-04-23
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Publication No.: US11431318B2Publication Date: 2022-08-30
- Inventor: Won Han , Chang Hyun Lim , Tae Yoon Kim , Sang Uk Son , Sang Kee Yoon
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2018-0162063 20181214,KR10-2019-0014686 20190208
- Main IPC: H03H9/13
- IPC: H03H9/13 ; H03H9/17 ; H01L41/047 ; H03H3/02 ; H03H9/02

Abstract:
An acoustic resonator includes: a substrate; a resonant portion including a center portion in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on the substrate, and an extension portion disposed along a periphery of the center portion; and a first metal layer disposed outwardly of the resonant portion to be electrically connected to the first electrode. The extension portion includes a lower insertion layer disposed on an upper surface of the first electrode or a lower surface of the first electrode. The piezoelectric layer includes a piezoelectric portion disposed in the center portion, and a bent portion disposed in the extension portion and extended from the piezoelectric portion at an incline according to a shape of the lower insertion layer. The lower insertion layer is formed of a conductive material extending an electrical path between the first electrode and the first metal layer.
Information query
IPC分类: