Invention Grant
- Patent Title: Integration of selector on confined phase change memory
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Application No.: US16451178Application Date: 2019-06-25
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Publication No.: US11437571B2Publication Date: 2022-09-06
- Inventor: Wanki Kim , Fabio Carta , Chung H. Lam , Robert L. Bruce
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Daniel Morris
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A method for fabricating a semiconductor device includes forming air gaps within respective dielectric layer portions to reduce thermal cross-talk between adjacent bits. Each of the dielectric portions is formed on a substrate each adjacent to sidewall liners formed on sidewalls of a phase change memory (PCM) layer. The method further includes forming a pillar including the sidewall liners and the PCM layer, and forming a selector layer on the pillar and the dielectric portions.
Information query
IPC分类: