Invention Grant
- Patent Title: Etchant composition and methods for manufacturing metal pattern and array substrate using the same
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Application No.: US16702773Application Date: 2019-12-04
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Publication No.: US11441071B2Publication Date: 2022-09-13
- Inventor: Bong-Kyun Kim , JinSeuk Kim , SeungBo Shim , ShinHyuk Choi , Seung-Hee Kim , Donghee Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2018-0154248 20181204
- Main IPC: C09K13/08
- IPC: C09K13/08 ; H01L29/45 ; H01L21/3213 ; H01L27/12 ; C23F1/10 ; C23F1/16 ; C09K13/00 ; C23F1/02 ; C23F1/18 ; C23F1/26 ; C23F1/44 ; G03F7/20 ; H01L21/306 ; H01L21/311 ; C09K13/06 ; G02F1/1368

Abstract:
An etchant composition of an embodiment includes a persulfate, a four-nitrogen ring compound, a two-chlorine compound, a fluorine compound and water, and has a weight ratio of the four-nitrogen ring compound and the two-chlorine compound of about 1:0.5 to about 1:4. The etchant composition may etch a multilayer metal substrate of titanium/copper and may be used for manufacturing a multilayer metal pattern and an array substrate having excellent properties of etched patterns.
Public/Granted literature
- US20200172807A1 ETCHANT COMPOSITION AND METHODS FOR MANUFACTURING METAL PATTERN AND ARRAY SUBSTRATE USING THE SAME Public/Granted day:2020-06-04
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