Invention Grant
- Patent Title: Heat-insulating shield member and single crystal manufacturing apparatus having the same
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Application No.: US16389347Application Date: 2019-04-19
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Publication No.: US11453958B2Publication Date: 2022-09-27
- Inventor: Yohei Fujikawa
- Applicant: SHOWA DENKO K.K.
- Applicant Address: JP Tokyo
- Assignee: SHOWA DENKO K.K.
- Current Assignee: SHOWA DENKO K.K.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JPJP2018-085453 20180426
- Main IPC: C30B35/00
- IPC: C30B35/00 ; C30B25/08 ; C30B29/36 ; C30B25/10 ; C30B25/12 ; C30B29/06

Abstract:
The present invention provides a heat-insulating shield member, wherein the heat-insulating shield member is arranged and used between a SiC source housing (3) and a substrate support (4) in a single crystal manufacturing apparatus (10), wherein the single crystal manufacturing apparatus (10) comprises a crystal growth container (2) and a heating member (5) arranged on an outer periphery of the crystal growth container (2), wherein the crystal growth container (2) includes the SiC source housing (3) disposed at a lower portion of the apparatus, and the substrate support (4) which is arranged above the SiC source housing (3) and supports a substrate (S) used for crystal growth so as to face the SiC source housing (3), and wherein the single crystal manufacturing apparatus (10) is configured to grow a single crystal (W) from a SiC source (M) on the substrate (S) by sublimating the SiC source (M) from the SiC source housing (3).
Public/Granted literature
- US20190330765A1 HEAT-INSULATING SHIELD MEMBER AND SINGLE CRYSTAL MANUFACTURING APPARATUS HAVING THE SAME Public/Granted day:2019-10-31
Information query
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