Invention Grant
- Patent Title: Techniques for layer fencing to improve edge linearity
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Application No.: US15804015Application Date: 2017-11-06
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Publication No.: US11456220B2Publication Date: 2022-09-27
- Inventor: Eliyahu Vronsky , Nahid Harjee
- Applicant: Kateeva, Inc.
- Applicant Address: US CA Newark
- Assignee: Kateeva, Inc.
- Current Assignee: Kateeva, Inc.
- Current Assignee Address: US CA Newark
- Agency: Hauptman Ham, LLP
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/02 ; H01L51/52 ; H01L51/56 ; H01L51/00 ; B41J2/205 ; B41J2/01 ; B41J2/21 ; H04N1/405 ; B05C11/10 ; H01L21/67 ; H01L33/52 ; H01L31/0203 ; H01L31/048 ; H01L33/54 ; H01L33/56

Abstract:
An ink jet process is used to deposit a material layer to a desired thickness. Layout data is converted to per-cell grayscale values, each representing ink volume to be locally delivered. The grayscale values are used to generate a halftone pattern to deliver variable ink volume (and thickness) to the substrate. The halftoning provides for a relatively continuous layer (e.g., without unintended gaps or holes) while providing for variable volume and, thus, contributes to variable ink/material buildup to achieve desired thickness. The ink is jetted as liquid or aerosol that suspends material used to form the material layer, for example, an organic material used to form an encapsulation layer for a flat panel device. The deposited layer is then cured or otherwise finished to complete the process.
Public/Granted literature
- US20180061720A1 Techniques For Layer Fencing To Improve Edge Linearity Public/Granted day:2018-03-01
Information query
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