- Patent Title: Rotation-rate sensor, method for producing a rotation-rate sensor
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Application No.: US16636798Application Date: 2018-07-30
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Publication No.: US11466985B2Publication Date: 2022-10-11
- Inventor: Jan-Timo Liewald , Andreas Lassl , Burkhard Kuhlmann , Matthias Kuehnel , Niels Bode , Nils Felix Kuhlmann , Odd-Axel Pruetz , Peter Degenfeld-Schonburg , Reinhard Neul
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102017213780.0 20170808
- International Application: PCT/EP2018/070567 WO 20180730
- International Announcement: WO2019/030036 WO 20190214
- Main IPC: G01C19/5705
- IPC: G01C19/5705 ; G01C19/5747 ; G01C19/5783 ; G01C19/5733

Abstract:
A rotation-rate sensor having a substrate, the substrate having a main-extension-plane, and the rotation-rate sensor includes at least one first and one second mass-element which are oscillate-able, and a first main-extension-direction of the substrate points from the first mass-element to the second mass-element, and a coupling-structure is situated in the first main-extension-direction between the first and second mass-element, in which a first coupling-region of the coupling-structure is situated in a first function-layer, and a first mass-region of the first mass-element is situated in the first function-layer and a second mass-region of the first mass-element is situated in a second function-layer, the first function-layer being situated in an extension-direction perpendicular to the main-extension-plane between the substrate and the second function-layer, a second main-extension-direction being situated perpendicular to the first main-extension-direction, and the first coupling-region having a greater extension in the first main-extension-direction than in the second main-extension-direction.
Public/Granted literature
- US20200378761A1 ROTATION-RATE SENSOR, METHOD FOR PRODUCING A ROTATION-RATE SENSOR Public/Granted day:2020-12-03
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